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Title: Silicon microfabricated beam expander

Abstract

The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.

Authors:
; ; ;  [1];  [2]
  1. Faculty of Electrical Engineering, Universiti Teknologi MARA Malaysia, 40450, Shah Alam, Selangor (Malaysia)
  2. School of Electrical and Electronic Engineering, Engineering Campus, Universiti Sains Malaysia, Seri Ampangan, 14300,Nibong Tebal, Pulau Pinang (Malaysia)
Publication Date:
OSTI Identifier:
22391330
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1653; Journal Issue: 1; Conference: APMAS 2014: 4. International Congress in Advances in Applied Physics and Materials Science, Fethiye (Turkey), 24-27 Apr 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ABSORPTION; ANISOTROPY; ETCHING; FABRICATION; FRESNEL REFLECTORS; GOLD; MATHEMATICAL SOLUTIONS; MONOCRYSTALS; PERFORMANCE; PLATES; POTASSIUM HYDROXIDES; SILICON

Citation Formats

Othman, A., E-mail: aliman@ppinang.uitm.edu.my, Ibrahim, M. N., Hamzah, I. H., Sulaiman, A. A., and Ain, M. F. Silicon microfabricated beam expander. United States: N. p., 2015. Web. doi:10.1063/1.4914275.
Othman, A., E-mail: aliman@ppinang.uitm.edu.my, Ibrahim, M. N., Hamzah, I. H., Sulaiman, A. A., & Ain, M. F. Silicon microfabricated beam expander. United States. doi:10.1063/1.4914275.
Othman, A., E-mail: aliman@ppinang.uitm.edu.my, Ibrahim, M. N., Hamzah, I. H., Sulaiman, A. A., and Ain, M. F. Mon . "Silicon microfabricated beam expander". United States. doi:10.1063/1.4914275.
@article{osti_22391330,
title = {Silicon microfabricated beam expander},
author = {Othman, A., E-mail: aliman@ppinang.uitm.edu.my and Ibrahim, M. N. and Hamzah, I. H. and Sulaiman, A. A. and Ain, M. F.},
abstractNote = {The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.},
doi = {10.1063/1.4914275},
journal = {AIP Conference Proceedings},
number = 1,
volume = 1653,
place = {United States},
year = {Mon Mar 30 00:00:00 EDT 2015},
month = {Mon Mar 30 00:00:00 EDT 2015}
}