skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

Abstract

This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken into account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.

Authors:
;  [1]
  1. Centre de Développement des Technologies Avancées (CDTA). BP n°17 Baba Hassen, Alger (Algeria)
Publication Date:
OSTI Identifier:
22391284
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1653; Journal Issue: 1; Conference: APMAS 2014: 4. International Congress in Advances in Applied Physics and Materials Science, Fethiye (Turkey), 24-27 Apr 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; C CODES; COMPUTERIZED SIMULATION; COUPLING; ELECTROSTATICS; FINITE ELEMENT METHOD; GEOMETRY; POLYCRYSTALS; POTENTIALS; RESONATORS; SILICON; STRAINS; STRESSES; SWITCHES

Citation Formats

Acheli, A., E-mail: aacheli@cdta.dz, and Serhane, R. Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics. United States: N. p., 2015. Web. doi:10.1063/1.4914196.
Acheli, A., E-mail: aacheli@cdta.dz, & Serhane, R. Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics. United States. doi:10.1063/1.4914196.
Acheli, A., E-mail: aacheli@cdta.dz, and Serhane, R. Mon . "Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics". United States. doi:10.1063/1.4914196.
@article{osti_22391284,
title = {Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics},
author = {Acheli, A., E-mail: aacheli@cdta.dz and Serhane, R.},
abstractNote = {This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken into account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.},
doi = {10.1063/1.4914196},
journal = {AIP Conference Proceedings},
number = 1,
volume = 1653,
place = {United States},
year = {Mon Mar 30 00:00:00 EDT 2015},
month = {Mon Mar 30 00:00:00 EDT 2015}
}