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Title: Enhanced photoresponse of conformal TiO{sub 2}/Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition

Abstract

In this study, the authors demonstrate a proof of concept nanostructured photodiode fabrication method via successive glancing angle deposition (GLAD) and atomic layer deposition (ALD). The fabricated metal-semiconductor nanorod (NR) arrays offer enhanced photoresponse compared to conventional planar thin-film counterparts. Silver (Ag) metallic NR arrays were deposited on Ag-film/Si templates by utilizing GLAD. Subsequently, titanium dioxide (TiO{sub 2}) was deposited conformally on Ag NRs via ALD. Scanning electron microscopy studies confirmed the successful formation of vertically aligned Ag NRs deposited via GLAD and conformal deposition of TiO{sub 2} on Ag NRs via ALD. Following the growth of TiO{sub 2} on Ag NRs, aluminum metallic top contacts were formed to complete the fabrication of NR-based Schottky photodiodes. Nanostructured devices exhibited a photo response enhancement factor of 1.49 × 10{sup 2} under a reverse bias of 3 V.

Authors:
;  [1]; ; ;  [2];  [3];  [4];  [4]
  1. National Nanotechnology Research Center (UNAM), Bilkent University, Bilkent, Ankara 06800, Turkey and Institute of Materials Science and Nanotechnology, Bilkent University, Bilkent, Ankara 06800 (Turkey)
  2. Department of Physics and Astronomy, University of Arkansas at Little Rock, Little Rock, Arkansas 72204 (United States)
  3. National Nanotechnology Research Center (UNAM), Bilkent University, Bilkent, Ankara 06800 (Turkey)
  4. (Turkey)
Publication Date:
OSTI Identifier:
22318081
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 33; Journal Issue: 1; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM; DEPOSITION; DEPOSITS; FABRICATION; NANOSTRUCTURES; PHOTODIODES; SCANNING ELECTRON MICROSCOPY; SCHOTTKY BARRIER DIODES; SEMICONDUCTOR MATERIALS; SILVER; THIN FILMS; TITANIUM OXIDES

Citation Formats

Haider, Ali, Biyikli, Necmi, E-mail: biyikli@unam.bilkent.edu.tr, Cansizoglu, Hilal, Cansizoglu, Mehmet Fatih, Karabacak, Tansel, Okyay, Ali Kemal, Institute of Materials Science and Nanotechnology, Bilkent University, Bilkent, Ankara 06800, and Department of Electrical and Electronics Engineering, Bilkent University, Bilkent, Ankara 06800. Enhanced photoresponse of conformal TiO{sub 2}/Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition. United States: N. p., 2015. Web. doi:10.1116/1.4898203.
Haider, Ali, Biyikli, Necmi, E-mail: biyikli@unam.bilkent.edu.tr, Cansizoglu, Hilal, Cansizoglu, Mehmet Fatih, Karabacak, Tansel, Okyay, Ali Kemal, Institute of Materials Science and Nanotechnology, Bilkent University, Bilkent, Ankara 06800, & Department of Electrical and Electronics Engineering, Bilkent University, Bilkent, Ankara 06800. Enhanced photoresponse of conformal TiO{sub 2}/Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition. United States. doi:10.1116/1.4898203.
Haider, Ali, Biyikli, Necmi, E-mail: biyikli@unam.bilkent.edu.tr, Cansizoglu, Hilal, Cansizoglu, Mehmet Fatih, Karabacak, Tansel, Okyay, Ali Kemal, Institute of Materials Science and Nanotechnology, Bilkent University, Bilkent, Ankara 06800, and Department of Electrical and Electronics Engineering, Bilkent University, Bilkent, Ankara 06800. Thu . "Enhanced photoresponse of conformal TiO{sub 2}/Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition". United States. doi:10.1116/1.4898203.
@article{osti_22318081,
title = {Enhanced photoresponse of conformal TiO{sub 2}/Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition},
author = {Haider, Ali and Biyikli, Necmi, E-mail: biyikli@unam.bilkent.edu.tr and Cansizoglu, Hilal and Cansizoglu, Mehmet Fatih and Karabacak, Tansel and Okyay, Ali Kemal and Institute of Materials Science and Nanotechnology, Bilkent University, Bilkent, Ankara 06800 and Department of Electrical and Electronics Engineering, Bilkent University, Bilkent, Ankara 06800},
abstractNote = {In this study, the authors demonstrate a proof of concept nanostructured photodiode fabrication method via successive glancing angle deposition (GLAD) and atomic layer deposition (ALD). The fabricated metal-semiconductor nanorod (NR) arrays offer enhanced photoresponse compared to conventional planar thin-film counterparts. Silver (Ag) metallic NR arrays were deposited on Ag-film/Si templates by utilizing GLAD. Subsequently, titanium dioxide (TiO{sub 2}) was deposited conformally on Ag NRs via ALD. Scanning electron microscopy studies confirmed the successful formation of vertically aligned Ag NRs deposited via GLAD and conformal deposition of TiO{sub 2} on Ag NRs via ALD. Following the growth of TiO{sub 2} on Ag NRs, aluminum metallic top contacts were formed to complete the fabrication of NR-based Schottky photodiodes. Nanostructured devices exhibited a photo response enhancement factor of 1.49 × 10{sup 2} under a reverse bias of 3 V.},
doi = {10.1116/1.4898203},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 1,
volume = 33,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 2015},
month = {Thu Jan 01 00:00:00 EST 2015}
}