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Title: Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

Abstract

Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces.

Authors:
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  1. Department of Physics, University of California, Santa Barbara, California 93106 (United States)
Publication Date:
OSTI Identifier:
22318007
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 6; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DIELECTRIC MATERIALS; MICROSTRUCTURE; MICROWAVE EQUIPMENT; QUBITS; RESONATORS; SUPERCONDUCTING DEVICES; SURFACE TREATMENTS

Citation Formats

Quintana, C. M., Megrant, A., Chen, Z., Dunsworth, A., Chiaro, B., Barends, R., Campbell, B., Chen, Yu, Hoi, I.-C., Jeffrey, E., Kelly, J., Mutus, J. Y., O'Malley, P. J. J., Neill, C., Roushan, P., Sank, D., Vainsencher, A., Wenner, J., White, T. C., Cleland, A. N., and and others. Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits. United States: N. p., 2014. Web. doi:10.1063/1.4893297.
Quintana, C. M., Megrant, A., Chen, Z., Dunsworth, A., Chiaro, B., Barends, R., Campbell, B., Chen, Yu, Hoi, I.-C., Jeffrey, E., Kelly, J., Mutus, J. Y., O'Malley, P. J. J., Neill, C., Roushan, P., Sank, D., Vainsencher, A., Wenner, J., White, T. C., Cleland, A. N., & and others. Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits. United States. doi:10.1063/1.4893297.
Quintana, C. M., Megrant, A., Chen, Z., Dunsworth, A., Chiaro, B., Barends, R., Campbell, B., Chen, Yu, Hoi, I.-C., Jeffrey, E., Kelly, J., Mutus, J. Y., O'Malley, P. J. J., Neill, C., Roushan, P., Sank, D., Vainsencher, A., Wenner, J., White, T. C., Cleland, A. N., and and others. Mon . "Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits". United States. doi:10.1063/1.4893297.
@article{osti_22318007,
title = {Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits},
author = {Quintana, C. M. and Megrant, A. and Chen, Z. and Dunsworth, A. and Chiaro, B. and Barends, R. and Campbell, B. and Chen, Yu and Hoi, I.-C. and Jeffrey, E. and Kelly, J. and Mutus, J. Y. and O'Malley, P. J. J. and Neill, C. and Roushan, P. and Sank, D. and Vainsencher, A. and Wenner, J. and White, T. C. and Cleland, A. N. and and others},
abstractNote = {Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces.},
doi = {10.1063/1.4893297},
journal = {Applied Physics Letters},
number = 6,
volume = 105,
place = {United States},
year = {Mon Aug 11 00:00:00 EDT 2014},
month = {Mon Aug 11 00:00:00 EDT 2014}
}