Air damping of atomically thin MoS{sub 2} nanomechanical resonators
- Department of Physics, College of Arts and Sciences, Case Western Reserve University, 10900 Euclid Avenue, Cleveland, Ohio 44106 (United States)
We report on experimental measurement of air damping effects in high frequency nanomembrane resonators made of atomically thin molybdenum disulfide (MoS{sub 2}) drumhead structures. Circular MoS{sub 2} nanomembranes with thickness of monolayer, few-layer, and multi-layer up to ∼70 nm (∼100 layers) exhibit intriguing pressure dependence of resonance characteristics. In completely covered drumheads, where there is no immediate equilibrium between the drum cavity and environment, resonance frequencies and quality (Q) factors strongly depend on environmental pressure due to bulging of the nanomembranes. In incompletely covered drumheads, strong frequency shifts due to compressing-cavity stiffening occur above ∼200 Torr. The pressure-dependent Q factors are limited by free molecule flow (FMF) damping, and all the mono-, bi-, and tri-layer devices exhibit lower FMF damping than thicker, conventional devices do.
- OSTI ID:
- 22311096
- Journal Information:
- Applied Physics Letters, Vol. 105, Issue 2; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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