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Title: Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Abstract

We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 μm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications.

Authors:
 [1];  [2]; ; ;  [1];  [3];  [4];  [5];  [6]; ;  [7]; ; ;  [8]
  1. Department of Advanced Interdisciplinary Sciences, Center for Optical Research and Education (CORE), Utsunomiya University, Utsunomiya, Tochigi 321-8585 (Japan)
  2. (Czech Republic)
  3. Graduate School of Science and Engineering for Research, University of Toyama, Toyama, Toyama 930-8555 (Japan)
  4. Institute for Laser Technology, 2-6 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  5. School of Nuclear Science and Technology, Lanzhou University, Lanzhou 730000 (China)
  6. (Ireland)
  7. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
  8. HiLASE Centre, Institute of Physics ASCR, v.v.i., Za Radnicí 828, 25241 Dolní Břežany (Czech Republic)
Publication Date:
OSTI Identifier:
22310928
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 7; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BRIGHTNESS; CONVERSION; DENSITY; EFFICIENCY; EMISSION; EVOLUTION; EXTREME ULTRAVIOLET RADIATION; IRRADIATION; LASER RADIATION; LASER TARGETS; PLASMA DENSITY; RADIATION SOURCES; TIN

Citation Formats

Roy, Amitava, E-mail: roy@fzu.cz, E-mail: aroy@barc.gov.in, HiLASE Centre, Institute of Physics ASCR, v.v.i., Za Radnicí 828, 25241 Dolní Břežany, Arai, Goki, Hara, Hiroyuki, Higashiguchi, Takeshi, E-mail: higashi@cc.utsunomiya-u.ac.jp, Ohashi, Hayato, Sunahara, Atsushi, Li, Bowen, School of Physics, University College Dublin, Belfield, Dublin 4, Dunne, Padraig, O'Sullivan, Gerry, Miura, Taisuke, Mocek, Tomas, and Endo, Akira. Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source. United States: N. p., 2014. Web. doi:10.1063/1.4893611.
Roy, Amitava, E-mail: roy@fzu.cz, E-mail: aroy@barc.gov.in, HiLASE Centre, Institute of Physics ASCR, v.v.i., Za Radnicí 828, 25241 Dolní Břežany, Arai, Goki, Hara, Hiroyuki, Higashiguchi, Takeshi, E-mail: higashi@cc.utsunomiya-u.ac.jp, Ohashi, Hayato, Sunahara, Atsushi, Li, Bowen, School of Physics, University College Dublin, Belfield, Dublin 4, Dunne, Padraig, O'Sullivan, Gerry, Miura, Taisuke, Mocek, Tomas, & Endo, Akira. Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source. United States. doi:10.1063/1.4893611.
Roy, Amitava, E-mail: roy@fzu.cz, E-mail: aroy@barc.gov.in, HiLASE Centre, Institute of Physics ASCR, v.v.i., Za Radnicí 828, 25241 Dolní Břežany, Arai, Goki, Hara, Hiroyuki, Higashiguchi, Takeshi, E-mail: higashi@cc.utsunomiya-u.ac.jp, Ohashi, Hayato, Sunahara, Atsushi, Li, Bowen, School of Physics, University College Dublin, Belfield, Dublin 4, Dunne, Padraig, O'Sullivan, Gerry, Miura, Taisuke, Mocek, Tomas, and Endo, Akira. Mon . "Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source". United States. doi:10.1063/1.4893611.
@article{osti_22310928,
title = {Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source},
author = {Roy, Amitava, E-mail: roy@fzu.cz, E-mail: aroy@barc.gov.in and HiLASE Centre, Institute of Physics ASCR, v.v.i., Za Radnicí 828, 25241 Dolní Břežany and Arai, Goki and Hara, Hiroyuki and Higashiguchi, Takeshi, E-mail: higashi@cc.utsunomiya-u.ac.jp and Ohashi, Hayato and Sunahara, Atsushi and Li, Bowen and School of Physics, University College Dublin, Belfield, Dublin 4 and Dunne, Padraig and O'Sullivan, Gerry and Miura, Taisuke and Mocek, Tomas and Endo, Akira},
abstractNote = {We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 μm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications.},
doi = {10.1063/1.4893611},
journal = {Applied Physics Letters},
number = 7,
volume = 105,
place = {United States},
year = {Mon Aug 18 00:00:00 EDT 2014},
month = {Mon Aug 18 00:00:00 EDT 2014}
}