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Title: Solid-state dewetting of Au/Ni bilayers: The effect of alloying on morphology evolution

Abstract

The solid-state dewetting of thin Au/Ni bilayers deposited onto SiO{sub 2}/Si substrates is investigated. A rapid thermal treatment is used to induce the dewetting process by an increase in temperature. The evolution of the (111) peaks of X-ray diffraction reveals a characteristic change due to mixing of Au and Ni. At low temperature, the Au-Ni thin film is found to break up at the phase boundaries and growing voids are shown to be surrounded by a Ni-rich phase. Branch-like void growth is observed. Upon annealing at increasing temperatures, Au-Ni solid solutions are formed well above the bulk equilibrium solubility of Au and Ni. It is found that this metastable phase formation makes the Au-Ni thin film less vulnerable to rupturing. Moreover, growth mode of still evolving voids changes into a more regular, faceted one due to alloying. Finally, it is shown that annealing above the miscibility gap forms supersaturated, well-oriented Au-Ni solid solution agglomerates via dewetting.

Authors:
; ; ;  [1]
  1. Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano, Chair Materials for Electronics and Electrical Engineering, TU Ilmenau, Ilmenau 98693 (Germany)
Publication Date:
OSTI Identifier:
22308555
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; CRYSTAL GROWTH; EQUILIBRIUM; EVOLUTION; GOLD; LAYERS; NICKEL; SILICON; SILICON OXIDES; SOLID SOLUTIONS; SOLIDS; SUBSTRATES; THIN FILMS; X-RAY DIFFRACTION

Citation Formats

Herz, A., Wang, D., E-mail: dong.wang@tu-ilmenau.de, Kups, Th., and Schaaf, P. Solid-state dewetting of Au/Ni bilayers: The effect of alloying on morphology evolution. United States: N. p., 2014. Web. doi:10.1063/1.4891448.
Herz, A., Wang, D., E-mail: dong.wang@tu-ilmenau.de, Kups, Th., & Schaaf, P. Solid-state dewetting of Au/Ni bilayers: The effect of alloying on morphology evolution. United States. doi:10.1063/1.4891448.
Herz, A., Wang, D., E-mail: dong.wang@tu-ilmenau.de, Kups, Th., and Schaaf, P. Mon . "Solid-state dewetting of Au/Ni bilayers: The effect of alloying on morphology evolution". United States. doi:10.1063/1.4891448.
@article{osti_22308555,
title = {Solid-state dewetting of Au/Ni bilayers: The effect of alloying on morphology evolution},
author = {Herz, A. and Wang, D., E-mail: dong.wang@tu-ilmenau.de and Kups, Th. and Schaaf, P.},
abstractNote = {The solid-state dewetting of thin Au/Ni bilayers deposited onto SiO{sub 2}/Si substrates is investigated. A rapid thermal treatment is used to induce the dewetting process by an increase in temperature. The evolution of the (111) peaks of X-ray diffraction reveals a characteristic change due to mixing of Au and Ni. At low temperature, the Au-Ni thin film is found to break up at the phase boundaries and growing voids are shown to be surrounded by a Ni-rich phase. Branch-like void growth is observed. Upon annealing at increasing temperatures, Au-Ni solid solutions are formed well above the bulk equilibrium solubility of Au and Ni. It is found that this metastable phase formation makes the Au-Ni thin film less vulnerable to rupturing. Moreover, growth mode of still evolving voids changes into a more regular, faceted one due to alloying. Finally, it is shown that annealing above the miscibility gap forms supersaturated, well-oriented Au-Ni solid solution agglomerates via dewetting.},
doi = {10.1063/1.4891448},
journal = {Journal of Applied Physics},
number = 4,
volume = 116,
place = {United States},
year = {Mon Jul 28 00:00:00 EDT 2014},
month = {Mon Jul 28 00:00:00 EDT 2014}
}