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Title: Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry

Abstract

We report on a comparative study between dielectric functions of Si nanoparticles (Si-NPs) obtained from Bruggeman effective medium approximation (BEMA), Maxwell-Garnett (MG), and a modified Maxwell-Garnett (MMG) models. Unlike BEMA and MG, a size-distribution dependent dielectric function of Si-NPs is considered in the introduced MMG model. We show that the standard deviation σ of a size distribution can be evaluated by analyzing the imaginary part of the dielectric functions of Si-NPs extracted from BEMA and MMG. In order to demonstrate this, several samples composed of Si-NPs embedded in silicon-rich silicon nitride are investigated by spectroscopic ellipsometry over the photon energy range varying between 2 and 4 eV. Assuming a lognormal size distribution of the Si nanoparticles, it is evidenced that the parameter σ ranges between 1.15 and 1.35. The values of size dispersion deduced by this methodology are in good agreement with TEM observations.

Authors:
 [1];  [2]; ;  [1];  [3];  [4];  [3];  [5]; ;  [3]
  1. LCP-A2MC, Institut Jean Barriol, Université de Lorraine, 1 Bd Arago, 57070 Metz (France)
  2. (formerly Max Planck Institute for Metals Research), Heisenbergstraße 3, D-70569 Stuttgart (Germany)
  3. ICube, Université de Strasbourg-CNRS, 23 rue du Loess BP20, 67037 Strasbourg Cedex 2 (France)
  4. (Canada)
  5. (France)
Publication Date:
OSTI Identifier:
22305945
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 116; Journal Issue: 10; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; DIELECTRIC MATERIALS; DISPERSIONS; DISTRIBUTION; ELLIPSOMETRY; EV RANGE; MATRIX MATERIALS; NANOPARTICLES; OPTICAL PROPERTIES; PHOTONS; SILICON; TRANSMISSION ELECTRON MICROSCOPY

Citation Formats

Keita, A.-S., E-mail: a.keita@is.mpg.de, Max Planck Institute for Intelligent Systems, Naciri, A. En, E-mail: aotmane.en-naciri@univ-lorraine.fr, Battie, Y., Delachat, F., CEA-Leti, 17 rue des Martyrs, 38054 Grenoble, France and INRS Centre Energie, Matériaux et Télécommunications, 800 de la Gauchetière Ouest, Montréal, Québec H5A 1K6, Carrada, M., CEMES-CNRS, nMat Group, 29 rue J. Marvig, 31055 Toulouse, Ferblantier, G., and Slaoui, A. Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry. United States: N. p., 2014. Web. doi:10.1063/1.4894619.
Keita, A.-S., E-mail: a.keita@is.mpg.de, Max Planck Institute for Intelligent Systems, Naciri, A. En, E-mail: aotmane.en-naciri@univ-lorraine.fr, Battie, Y., Delachat, F., CEA-Leti, 17 rue des Martyrs, 38054 Grenoble, France and INRS Centre Energie, Matériaux et Télécommunications, 800 de la Gauchetière Ouest, Montréal, Québec H5A 1K6, Carrada, M., CEMES-CNRS, nMat Group, 29 rue J. Marvig, 31055 Toulouse, Ferblantier, G., & Slaoui, A. Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry. United States. doi:10.1063/1.4894619.
Keita, A.-S., E-mail: a.keita@is.mpg.de, Max Planck Institute for Intelligent Systems, Naciri, A. En, E-mail: aotmane.en-naciri@univ-lorraine.fr, Battie, Y., Delachat, F., CEA-Leti, 17 rue des Martyrs, 38054 Grenoble, France and INRS Centre Energie, Matériaux et Télécommunications, 800 de la Gauchetière Ouest, Montréal, Québec H5A 1K6, Carrada, M., CEMES-CNRS, nMat Group, 29 rue J. Marvig, 31055 Toulouse, Ferblantier, G., and Slaoui, A. Sun . "Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry". United States. doi:10.1063/1.4894619.
@article{osti_22305945,
title = {Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry},
author = {Keita, A.-S., E-mail: a.keita@is.mpg.de and Max Planck Institute for Intelligent Systems and Naciri, A. En, E-mail: aotmane.en-naciri@univ-lorraine.fr and Battie, Y. and Delachat, F. and CEA-Leti, 17 rue des Martyrs, 38054 Grenoble, France and INRS Centre Energie, Matériaux et Télécommunications, 800 de la Gauchetière Ouest, Montréal, Québec H5A 1K6 and Carrada, M. and CEMES-CNRS, nMat Group, 29 rue J. Marvig, 31055 Toulouse and Ferblantier, G. and Slaoui, A.},
abstractNote = {We report on a comparative study between dielectric functions of Si nanoparticles (Si-NPs) obtained from Bruggeman effective medium approximation (BEMA), Maxwell-Garnett (MG), and a modified Maxwell-Garnett (MMG) models. Unlike BEMA and MG, a size-distribution dependent dielectric function of Si-NPs is considered in the introduced MMG model. We show that the standard deviation σ of a size distribution can be evaluated by analyzing the imaginary part of the dielectric functions of Si-NPs extracted from BEMA and MMG. In order to demonstrate this, several samples composed of Si-NPs embedded in silicon-rich silicon nitride are investigated by spectroscopic ellipsometry over the photon energy range varying between 2 and 4 eV. Assuming a lognormal size distribution of the Si nanoparticles, it is evidenced that the parameter σ ranges between 1.15 and 1.35. The values of size dispersion deduced by this methodology are in good agreement with TEM observations.},
doi = {10.1063/1.4894619},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 10,
volume = 116,
place = {United States},
year = {2014},
month = {9}
}