Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF{sub 4} discharge

Journal Article · Sat Jun 14 00:00:00 EDT 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4882297· OSTI ID:22304166

Zhang, Quan-Zhi ^[1]; Wang, You-Nian ^[1]; Bogaerts, Annemie ^[2]

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1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)
2. Department of Chemistry, University of Antwerp, Campus Drie Eiken, Universiteitsplein 1, BE-2610 Wilrijk-Antwerp (Belgium)

Computer simulations based on the particle-in-cell/Monte Carlo collision method are performed to study the plasma characteristics and especially the transition in electron heating mechanisms in a hybrid direct current (dc)/dual-frequency (DF) capacitively coupled CF{sub 4} discharge. When applying a superposed dc voltage, the plasma density first increases, then decreases, and finally increases again, which is in good agreement with experiments. This trend can be explained by the transition between the four main heating modes, i.e., DF coupling, dc and DF coupling, dc source dominant heating, and secondary electron dominant heating.

• OSTI ID: 22304166
• Journal Information: Journal of Applied Physics, Vol. 115, Issue 22; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CARBON TETRAFLUORIDE
COLLISIONS
COMPUTERIZED SIMULATION
COUPLING
DIRECT CURRENT
ELECTRIC POTENTIAL
ELECTRONS
HEATING
HYBRID SYSTEMS
MONTE CARLO METHOD
PLASMA DENSITY