skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Ultrafast dark-field surface inspection with hybrid-dispersion laser scanning

Abstract

High-speed surface inspection plays an important role in industrial manufacturing, safety monitoring, and quality control. It is desirable to go beyond the speed limitation of current technologies for reducing manufacturing costs and opening a new window onto a class of applications that require high-throughput sensing. Here, we report a high-speed dark-field surface inspector for detection of micrometer-sized surface defects that can travel at a record high speed as high as a few kilometers per second. This method is based on a modified time-stretch microscope that illuminates temporally and spatially dispersed laser pulses on the surface of a fast-moving object and detects scattered light from defects on the surface with a sensitive photodetector in a dark-field configuration. The inspector's ability to perform ultrafast dark-field surface inspection enables real-time identification of difficult-to-detect features on weakly reflecting surfaces and hence renders the method much more practical than in the previously demonstrated bright-field configuration. Consequently, our inspector provides nearly 1000 times higher scanning speed than conventional inspectors. To show our method's broad utility, we demonstrate real-time inspection of the surface of various objects (a non-reflective black film, transparent flexible film, and reflective hard disk) for detection of 10 μm or smaller defects on a movingmore » target at 20 m/s within a scan width of 25 mm at a scan rate of 90.9 MHz. Our method holds promise for improving the cost and performance of organic light-emitting diode displays for next-generation smart phones, lithium-ion batteries for green electronics, and high-efficiency solar cells.« less

Authors:
 [1];  [1];  [1];  [1];  [1];  [2];  [1]
  1. Department of Electrical Engineering, University of California, Los Angeles, California 90095 (United States)
  2. Yokohama Research Laboratory, Hitachi, Ltd., Kanagawa 244-0817 (Japan)
Publication Date:
OSTI Identifier:
22303836
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 104; Journal Issue: 25; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CONFIGURATION; CURRENTS; DEFECTS; DETECTION; DISPERSIONS; ELECTRIC BATTERIES; ELECTRIC UTILITIES; FILMS; GAS UTILITIES; INSPECTION; LASERS; LIGHT EMITTING DIODES; LITHIUM IONS; MAGNETIC DISKS; MANUFACTURING; PULSES; SOLAR CELLS; SURFACES; VISIBLE RADIATION

Citation Formats

Yazaki, Akio, Yokohama Research Laboratory, Hitachi, Ltd., Kanagawa 244-0817, Kim, Chanju, Advanced Photonics Research Institute, Gwangju Institute of Science and Technology, Gwangju 500-712, Chan, Jacky, Mahjoubfar, Ata, California NanoSystems Institute, University of California, Los Angeles, California 90095, Goda, Keisuke, Department of Chemistry, University of Tokyo, Tokyo 113-0033, Watanabe, Masahiro, Jalali, Bahram, California NanoSystems Institute, University of California, Los Angeles, California 90095, Department of Bioengineering, University of California, Los Angeles, California 90095, and Department of Surgery, David Geffen School of Medicine, University of California, Los Angeles, California 90095. Ultrafast dark-field surface inspection with hybrid-dispersion laser scanning. United States: N. p., 2014. Web. doi:10.1063/1.4885147.
Yazaki, Akio, Yokohama Research Laboratory, Hitachi, Ltd., Kanagawa 244-0817, Kim, Chanju, Advanced Photonics Research Institute, Gwangju Institute of Science and Technology, Gwangju 500-712, Chan, Jacky, Mahjoubfar, Ata, California NanoSystems Institute, University of California, Los Angeles, California 90095, Goda, Keisuke, Department of Chemistry, University of Tokyo, Tokyo 113-0033, Watanabe, Masahiro, Jalali, Bahram, California NanoSystems Institute, University of California, Los Angeles, California 90095, Department of Bioengineering, University of California, Los Angeles, California 90095, & Department of Surgery, David Geffen School of Medicine, University of California, Los Angeles, California 90095. Ultrafast dark-field surface inspection with hybrid-dispersion laser scanning. United States. doi:10.1063/1.4885147.
Yazaki, Akio, Yokohama Research Laboratory, Hitachi, Ltd., Kanagawa 244-0817, Kim, Chanju, Advanced Photonics Research Institute, Gwangju Institute of Science and Technology, Gwangju 500-712, Chan, Jacky, Mahjoubfar, Ata, California NanoSystems Institute, University of California, Los Angeles, California 90095, Goda, Keisuke, Department of Chemistry, University of Tokyo, Tokyo 113-0033, Watanabe, Masahiro, Jalali, Bahram, California NanoSystems Institute, University of California, Los Angeles, California 90095, Department of Bioengineering, University of California, Los Angeles, California 90095, and Department of Surgery, David Geffen School of Medicine, University of California, Los Angeles, California 90095. Mon . "Ultrafast dark-field surface inspection with hybrid-dispersion laser scanning". United States. doi:10.1063/1.4885147.
@article{osti_22303836,
title = {Ultrafast dark-field surface inspection with hybrid-dispersion laser scanning},
author = {Yazaki, Akio and Yokohama Research Laboratory, Hitachi, Ltd., Kanagawa 244-0817 and Kim, Chanju and Advanced Photonics Research Institute, Gwangju Institute of Science and Technology, Gwangju 500-712 and Chan, Jacky and Mahjoubfar, Ata and California NanoSystems Institute, University of California, Los Angeles, California 90095 and Goda, Keisuke and Department of Chemistry, University of Tokyo, Tokyo 113-0033 and Watanabe, Masahiro and Jalali, Bahram and California NanoSystems Institute, University of California, Los Angeles, California 90095 and Department of Bioengineering, University of California, Los Angeles, California 90095 and Department of Surgery, David Geffen School of Medicine, University of California, Los Angeles, California 90095},
abstractNote = {High-speed surface inspection plays an important role in industrial manufacturing, safety monitoring, and quality control. It is desirable to go beyond the speed limitation of current technologies for reducing manufacturing costs and opening a new window onto a class of applications that require high-throughput sensing. Here, we report a high-speed dark-field surface inspector for detection of micrometer-sized surface defects that can travel at a record high speed as high as a few kilometers per second. This method is based on a modified time-stretch microscope that illuminates temporally and spatially dispersed laser pulses on the surface of a fast-moving object and detects scattered light from defects on the surface with a sensitive photodetector in a dark-field configuration. The inspector's ability to perform ultrafast dark-field surface inspection enables real-time identification of difficult-to-detect features on weakly reflecting surfaces and hence renders the method much more practical than in the previously demonstrated bright-field configuration. Consequently, our inspector provides nearly 1000 times higher scanning speed than conventional inspectors. To show our method's broad utility, we demonstrate real-time inspection of the surface of various objects (a non-reflective black film, transparent flexible film, and reflective hard disk) for detection of 10 μm or smaller defects on a moving target at 20 m/s within a scan width of 25 mm at a scan rate of 90.9 MHz. Our method holds promise for improving the cost and performance of organic light-emitting diode displays for next-generation smart phones, lithium-ion batteries for green electronics, and high-efficiency solar cells.},
doi = {10.1063/1.4885147},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 25,
volume = 104,
place = {United States},
year = {2014},
month = {6}
}