# Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge

## Abstract

Based on the drift and diffusion approximation theory, a 1D fluid model on capacitively coupled RF argon glow discharge at low pressure is established to study the effect of secondary electron emission (SEE) on the discharge characteristics. The model is numerically solved by using a finite difference method and the numerical results are obtained. The numerical results indicate that when the SEE coefficient is larger, the plasma density is higher and the time of reaching steady state is longer. It is also found that the cycle-averaged electric field, electric potential, and electron temperature change a little as the SEE coefficient is increased. Moreover, the discharge characteristics in some nonequilibrium discharge processes with different SEE coefficients have been compared. The analysis shows that when the SEE coefficient is varied from 0.01 to 0.3, the cycle-averaged electron net power absorption, electron heating rate, thermal convective term, electron energy dissipation, and ionization all have different degrees of growth. While the electron energy dissipation and ionization are quite special, there appear two peaks near each sheath region in the discharge with a relatively larger SEE coefficient. In this case, the discharge is certainly operated in a hybrid α-γ-mode.

- Authors:

- Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)

- Publication Date:

- OSTI Identifier:
- 22303600

- Resource Type:
- Journal Article

- Resource Relation:
- Journal Name: Physics of Plasmas; Journal Volume: 21; Journal Issue: 8; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)

- Country of Publication:
- United States

- Language:
- English

- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ABSORPTION; ARGON; COMPARATIVE EVALUATIONS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRON EMISSION; ELECTRON TEMPERATURE; ENERGY LOSSES; FINITE DIFFERENCE METHOD; GLOW DISCHARGES; HEATING RATE; NUMERICAL ANALYSIS; PLASMA DENSITY

### Citation Formats

```
Liu, Qian, Liu, Yue, E-mail: liuyue@dlut.edu.cn, Samir, Tagra, and Ma, Zhaoshuai.
```*Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge*. United States: N. p., 2014.
Web. doi:10.1063/1.4894223.

```
Liu, Qian, Liu, Yue, E-mail: liuyue@dlut.edu.cn, Samir, Tagra, & Ma, Zhaoshuai.
```*Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge*. United States. doi:10.1063/1.4894223.

```
Liu, Qian, Liu, Yue, E-mail: liuyue@dlut.edu.cn, Samir, Tagra, and Ma, Zhaoshuai. Fri .
"Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge". United States.
doi:10.1063/1.4894223.
```

```
@article{osti_22303600,
```

title = {Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge},

author = {Liu, Qian and Liu, Yue, E-mail: liuyue@dlut.edu.cn and Samir, Tagra and Ma, Zhaoshuai},

abstractNote = {Based on the drift and diffusion approximation theory, a 1D fluid model on capacitively coupled RF argon glow discharge at low pressure is established to study the effect of secondary electron emission (SEE) on the discharge characteristics. The model is numerically solved by using a finite difference method and the numerical results are obtained. The numerical results indicate that when the SEE coefficient is larger, the plasma density is higher and the time of reaching steady state is longer. It is also found that the cycle-averaged electric field, electric potential, and electron temperature change a little as the SEE coefficient is increased. Moreover, the discharge characteristics in some nonequilibrium discharge processes with different SEE coefficients have been compared. The analysis shows that when the SEE coefficient is varied from 0.01 to 0.3, the cycle-averaged electron net power absorption, electron heating rate, thermal convective term, electron energy dissipation, and ionization all have different degrees of growth. While the electron energy dissipation and ionization are quite special, there appear two peaks near each sheath region in the discharge with a relatively larger SEE coefficient. In this case, the discharge is certainly operated in a hybrid α-γ-mode.},

doi = {10.1063/1.4894223},

journal = {Physics of Plasmas},

number = 8,

volume = 21,

place = {United States},

year = {Fri Aug 15 00:00:00 EDT 2014},

month = {Fri Aug 15 00:00:00 EDT 2014}

}