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Title: Growth model of silicon nanoislands on sapphire

Journal Article · · Semiconductors
;  [1]
  1. Lobachevsky University of Nizhni Novgorod (Russian Federation)

A growth model of silicon nanoislands on silicon by molecular-beam epitaxy is refined. It is shown that silicon islands grow due to the diffusion of material from the wetting layer, with the contribution from direct hits of atoms to this growth being nearly zero.

OSTI ID:
22300422
Journal Information:
Semiconductors, Vol. 47, Issue 12; Other Information: Copyright (c) 2013 Pleiades Publishing, Ltd.; http://www.springer-ny.com; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7826
Country of Publication:
United States
Language:
English

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