skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques

Abstract

Micron-sized, periodic crystalline Silicon columns on glass substrate were electrically contacted with a transparent conductive oxide front contact and a focused ion beam processed local back contact. Individual column contacts as well as arrays of >100 contacted columns were processed. Current-voltage characteristics of the devices were determined. By comparison with characteristics obtained from adapted device simulation, the absorber defect density was reconstructed. The contacting scheme allows the fabrication of testing devices in order to evaluate the electronic potential of promising semiconductor microstructures.

Authors:
; ; ;  [1]; ; ;  [2]
  1. TU Berlin, FG HLB/PVcomB, Sekr. E4, Einsteinufer 19, D-10587 Berlin (Germany)
  2. Helmholtz-Zentrum Berlin für Materialien und Energie, E-IS, Kekuléstr. 5, D-12489 Berlin (Germany)
Publication Date:
OSTI Identifier:
22299891
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 24; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CRYSTAL DEFECTS; CURRENTS; ELECTRIC CONTACTS; ELECTRIC POTENTIAL; GLASS; ION BEAMS; MICROSTRUCTURE; OPACITY; OXIDES; PERIODICITY; SEMICONDUCTOR MATERIALS; SILICON; SIMULATION; SUBSTRATES

Citation Formats

Friedrich, F., E-mail: felice.friedrich@tu-berlin.de, Herfurth, N., Teodoreanu, A.-M., Boit, C., Sontheimer, T., Preidel, V., and Rech, B. Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques. United States: N. p., 2014. Web. doi:10.1063/1.4883642.
Friedrich, F., E-mail: felice.friedrich@tu-berlin.de, Herfurth, N., Teodoreanu, A.-M., Boit, C., Sontheimer, T., Preidel, V., & Rech, B. Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques. United States. doi:10.1063/1.4883642.
Friedrich, F., E-mail: felice.friedrich@tu-berlin.de, Herfurth, N., Teodoreanu, A.-M., Boit, C., Sontheimer, T., Preidel, V., and Rech, B. Mon . "Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques". United States. doi:10.1063/1.4883642.
@article{osti_22299891,
title = {Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques},
author = {Friedrich, F., E-mail: felice.friedrich@tu-berlin.de and Herfurth, N. and Teodoreanu, A.-M. and Boit, C. and Sontheimer, T. and Preidel, V. and Rech, B.},
abstractNote = {Micron-sized, periodic crystalline Silicon columns on glass substrate were electrically contacted with a transparent conductive oxide front contact and a focused ion beam processed local back contact. Individual column contacts as well as arrays of >100 contacted columns were processed. Current-voltage characteristics of the devices were determined. By comparison with characteristics obtained from adapted device simulation, the absorber defect density was reconstructed. The contacting scheme allows the fabrication of testing devices in order to evaluate the electronic potential of promising semiconductor microstructures.},
doi = {10.1063/1.4883642},
journal = {Applied Physics Letters},
number = 24,
volume = 104,
place = {United States},
year = {Mon Jun 16 00:00:00 EDT 2014},
month = {Mon Jun 16 00:00:00 EDT 2014}
}
  • Sources of single photons are of fundamental importance in many applications as to provide quantum states for quantum communication and quantum information processing. Color centers in diamond are prominent candidates to generate and manipulate quantum states of light, even at room temperature. However, the efficiency of photon collection of the color centers in bulk diamond is greatly reduced by refraction at the diamond/air interface. To address this issue, diamond structuring has been investigated by various methods. Among them, focused-ion-beam (FIB) direct patterning has been recognized as the most favorable technique. But it has been noted that diamond tends to presentmore » significant challenges in FIB milling, e.g., the susceptibility of forming charging related artifacts and topographical features. In this work, periodically-positioned-rings and overlay patterning with stagger-superimposed-rings were proposed to alleviate some problems encountered in FIB milling of diamond, for improved surface morphology and shape control. Cross-scale network and uniform nanostructure arrays have been achieved in single crystalline diamond substrates. High quality diamond solid immersion lens and nanopillars were sculptured with a nitrogen-vacancy center buried at the desired position. Compared with the film counterpart, an enhancement of about ten folds in single photon collection efficiency was achieved with greatly improved signal to noise ratio. All these results indicate that FIB milling through over-lay patterning could be an effective approach to fabricate diamond structures, potentially for quantum information studies.« less
  • Cross-sections of laser fabricated nanosharp tips and microbumps on silicon and metal thin films are produced and examined in this work. These structures are formed with a Q-switched neodymium doped yttrium aluminum garnet nanosecond-pulse laser, emitting at its fourth harmonic of 266 nm, using a mask projection technique to generate circular laser spots, several microns in diameter. Cross-section of selected structures were produced using a focused ion beam and were characterized via electron microscopy. The diffraction patterns of the silicon samples indicate that the laser formed tip maintains the same single crystal structure as the original silicon film. Examinations ofmore » the laser formed structures in metal films confirm that the microbumps are hollow, while revealing that the vertical protrusions are solid.« less
  • We describe a maskless reactive ion etching process that employs CF{sub 4} gas plasma to create nanoscale structures in silicon. Process conditions are controlled to produce pillars of up to 2 {mu}m tall and less than 50 nm wide. The contributing mechanisms are discussed based on the trends observed for varying plasma conditions. Higher pressures or lower self-bias voltages result in pyramidal structures. Lower pressure and higher voltage result in needlelike structures that resemble silicon wires. By carefully controlling the automasking process mechanism, columnar silicon structures were reproducibly formed with good uniformity all over the wafer. The regularity of themore » fabricated structures, process controllability, and process compatibility of dry etching are promising for potential photonic and optoelectronic applications.« less
  • Focused ion beam (FIB) milling is the typical way in which micro-pillars are fabricated to study small-scale plasticity and size effects in uniaxial compression. However, FIB milling can introduce defects into the milled pillars. To investigate the effects of FIB damage on mechanical behavior, we tested Mo-alloy micro-pillars that were FIB milled following directional solidification, and compared their compressive response to pillars that were not FIB milled. We also FIB milled at glancing incidence a Mo-alloy single-crystal surface, and compared its nanoindentation response to an electro-polished surface of the same crystal. Consequences for the interpretation of data obtained from FIBmore » milled micro-pillars are discussed.« less
  • Micro/nanofabrication of biocompatible and biodegradable poly({sub L}-lactic acid) (PLLA) using focused Ga ion beam direct etching was evaluated for future bio-device applications. The fabrication performance was determined with different ion fluences and fluxes (beam currents), and it was found that the etching speed and fabrication accuracy were affected by irradiation-induced heat. Focused ion beam (FIB)-irradiated surfaces were analyzed using micro-area X-ray photoelectron spectroscopy. Owing to reactions such as the physical sputtering of atoms and radiation-induced decomposition, PLLA was gradually carbonized with increasing C=C bonds. Controlled micro/nanostructures of PLLA were fabricated with C=C bond-rich surfaces expected to have good cell attachmentmore » properties.« less