Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer
Abstract
This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.
- Authors:
-
- Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan (China)
- WPI-AIMR, Tohoku University, Sendai (Japan)
- Department of Mechanical Engineering, Tohoku University, Sendai (Japan)
- Publication Date:
- OSTI Identifier:
- 22269178
- Resource Type:
- Journal Article
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 104; Journal Issue: 18; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ELECTRON BEAMS; PHONONS; QUARTZ; SUBSTRATES; THIN FILMS; WAVE PROPAGATION
Citation Formats
Liu, Ting-Wei, Wu, Tsung-Tsong, Lin, Yu-Ching, Tsai, Yao-Chuan, Ono, Takahito, and Tanaka, Shuji. Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer. United States: N. p., 2014.
Web. doi:10.1063/1.4875981.
Liu, Ting-Wei, Wu, Tsung-Tsong, Lin, Yu-Ching, Tsai, Yao-Chuan, Ono, Takahito, & Tanaka, Shuji. Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer. United States. https://doi.org/10.1063/1.4875981
Liu, Ting-Wei, Wu, Tsung-Tsong, Lin, Yu-Ching, Tsai, Yao-Chuan, Ono, Takahito, and Tanaka, Shuji. 2014.
"Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer". United States. https://doi.org/10.1063/1.4875981.
@article{osti_22269178,
title = {Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer},
author = {Liu, Ting-Wei and Wu, Tsung-Tsong and Lin, Yu-Ching and Tsai, Yao-Chuan and Ono, Takahito and Tanaka, Shuji},
abstractNote = {This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.},
doi = {10.1063/1.4875981},
url = {https://www.osti.gov/biblio/22269178},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 18,
volume = 104,
place = {United States},
year = {Mon May 05 00:00:00 EDT 2014},
month = {Mon May 05 00:00:00 EDT 2014}
}
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