skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Density determination of nano-layers depending to the thickness by non-destructive method

Abstract

Non-destructive tests used to characterize and observe the state of the solids near the surface or at depth, without damaging them or damaging them. Density is frequently used to follow the variations of the physical structure of the samples, as well as in the calculation of quantity of material required to fill a given volume, and it is also used to determine the homogeneity of a sample. However, the measurement of the acoustic properties (density, elastic constants,…) of a thin film whose thickness is smaller than several atomic layers is not easy to perform. For that reason, we expose in this work the effects of the thicknesses of thin films on the evolution of the density, where several samples are analyzed. The samples selected structures are thin films deposited on substrates, these coatings have thicknesses varying from a few atomic layers to ten or so micrometers and can change the properties of the substrate on which they are deposited. To do so, we considered a great number of layers (Cr, Al, SiO{sub 2}, ZnO, Cu, AlN, Si{sub 3}N{sub 4}, SiC) deposited on different substrates (Al{sub 2}O{sub 3}, Cu and Quartz). It is first shown that the density exhibits a dispersivemore » behaviour. Such a behaviour is characterized by an initial increase (or decrease) followed by a saturated region. Further investigations of these dependences led to the determination of a semi-empirical universal relations, ρ=f(h/λ{sub T}), for all the investigated layer/substrate combination. Such expression could be of great importance in the density prediction of even layers thicknesses.« less

Authors:
 [1]; ;  [2]
  1. Département des Sciences Fondamentales, Faculté des Sciences et Sciences de l'Ingénieur, Université 20 Aout.1955, Skikda, BP 26, DZ-21000 Algérie and Laboratoire des Semi-Conducteurs, Département de Physique (Algeria)
  2. Laboratoire des Semi-Conducteurs, Département de Physique, Faculté des Sciences, Université Badji-Mokhtar, BP 12, Annaba, DZ-23000 (Algeria)
Publication Date:
OSTI Identifier:
22261690
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1569; Journal Issue: 1; Conference: 3. international advances in applied physics and materials science congress, Antalya (Turkey), 24-28 Apr 2013; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM NITRIDES; ALUMINIUM OXIDES; DENSITY; DEPOSITS; LAYERS; SILICON CARBIDES; SILICON NITRIDES; SILICON OXIDES; SOLIDS; SUBSTRATES; THICKNESS; THIN FILMS; ZINC OXIDES

Citation Formats

Gacem, A., Doghmane, A., and Hadjoub, Z. Density determination of nano-layers depending to the thickness by non-destructive method. United States: N. p., 2013. Web. doi:10.1063/1.4849256.
Gacem, A., Doghmane, A., & Hadjoub, Z. Density determination of nano-layers depending to the thickness by non-destructive method. United States. https://doi.org/10.1063/1.4849256
Gacem, A., Doghmane, A., and Hadjoub, Z. 2013. "Density determination of nano-layers depending to the thickness by non-destructive method". United States. https://doi.org/10.1063/1.4849256.
@article{osti_22261690,
title = {Density determination of nano-layers depending to the thickness by non-destructive method},
author = {Gacem, A. and Doghmane, A. and Hadjoub, Z.},
abstractNote = {Non-destructive tests used to characterize and observe the state of the solids near the surface or at depth, without damaging them or damaging them. Density is frequently used to follow the variations of the physical structure of the samples, as well as in the calculation of quantity of material required to fill a given volume, and it is also used to determine the homogeneity of a sample. However, the measurement of the acoustic properties (density, elastic constants,…) of a thin film whose thickness is smaller than several atomic layers is not easy to perform. For that reason, we expose in this work the effects of the thicknesses of thin films on the evolution of the density, where several samples are analyzed. The samples selected structures are thin films deposited on substrates, these coatings have thicknesses varying from a few atomic layers to ten or so micrometers and can change the properties of the substrate on which they are deposited. To do so, we considered a great number of layers (Cr, Al, SiO{sub 2}, ZnO, Cu, AlN, Si{sub 3}N{sub 4}, SiC) deposited on different substrates (Al{sub 2}O{sub 3}, Cu and Quartz). It is first shown that the density exhibits a dispersive behaviour. Such a behaviour is characterized by an initial increase (or decrease) followed by a saturated region. Further investigations of these dependences led to the determination of a semi-empirical universal relations, ρ=f(h/λ{sub T}), for all the investigated layer/substrate combination. Such expression could be of great importance in the density prediction of even layers thicknesses.},
doi = {10.1063/1.4849256},
url = {https://www.osti.gov/biblio/22261690}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1569,
place = {United States},
year = {Mon Dec 16 00:00:00 EST 2013},
month = {Mon Dec 16 00:00:00 EST 2013}
}