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Title: Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition

Abstract

A combination of the atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques is successfully employed to fabricate thin films incorporating superlattice structures that consist of single layers of organic molecules between thicker layers of ZnO. Diethyl zinc and water are used as precursors for the deposition of ZnO by ALD, while three different organic precursors are investigated for the MLD part: hydroquinone, 4-aminophenol and 4,4′-oxydianiline. The successful superlattice formation with all the organic precursors is verified through x-ray reflectivity studies. The effects of the interspersed organic layers/superlattice structure on the electrical and thermoelectric properties of ZnO are investigated through resistivity and Seebeck coefficient measurements at room temperature. The results suggest an increase in carrier concentration for small concentrations of organic layers, while higher concentrations seem to lead to rather large reductions in carrier concentration.

Authors:
; ;  [1]
  1. Department of Chemistry, Aalto University, FI-00076 Aalto (Finland)
Publication Date:
OSTI Identifier:
22258784
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 32; Journal Issue: 1; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0734-2101
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; DEPOSITION; LAYERS; PRECURSOR; REFLECTIVITY; SUPERLATTICES; TEMPERATURE RANGE 0273-0400 K; THERMOELECTRIC PROPERTIES; THIN FILMS; WATER; X RADIATION; ZINC; ZINC OXIDES

Citation Formats

Tynell, Tommi, Yamauchi, Hisao, and Karppinen, Maarit, E-mail: maarit.karppinen@aalto.fi. Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition. United States: N. p., 2014. Web. doi:10.1116/1.4831751.
Tynell, Tommi, Yamauchi, Hisao, & Karppinen, Maarit, E-mail: maarit.karppinen@aalto.fi. Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition. United States. doi:10.1116/1.4831751.
Tynell, Tommi, Yamauchi, Hisao, and Karppinen, Maarit, E-mail: maarit.karppinen@aalto.fi. Wed . "Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition". United States. doi:10.1116/1.4831751.
@article{osti_22258784,
title = {Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition},
author = {Tynell, Tommi and Yamauchi, Hisao and Karppinen, Maarit, E-mail: maarit.karppinen@aalto.fi},
abstractNote = {A combination of the atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques is successfully employed to fabricate thin films incorporating superlattice structures that consist of single layers of organic molecules between thicker layers of ZnO. Diethyl zinc and water are used as precursors for the deposition of ZnO by ALD, while three different organic precursors are investigated for the MLD part: hydroquinone, 4-aminophenol and 4,4′-oxydianiline. The successful superlattice formation with all the organic precursors is verified through x-ray reflectivity studies. The effects of the interspersed organic layers/superlattice structure on the electrical and thermoelectric properties of ZnO are investigated through resistivity and Seebeck coefficient measurements at room temperature. The results suggest an increase in carrier concentration for small concentrations of organic layers, while higher concentrations seem to lead to rather large reductions in carrier concentration.},
doi = {10.1116/1.4831751},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
issn = {0734-2101},
number = 1,
volume = 32,
place = {United States},
year = {2014},
month = {1}
}