Defects in nonpolar (134{sup ¯}0) ZnO epitaxial film grown on (114) LaAlO{sub 3} substrate

Journal Article · Sat Mar 15 00:00:00 EDT 2014 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.4830275· OSTI ID:22258761

Yen, Tzu-Chun; Wang, Wei-Lin; Peng, Chun-Yen; Tian, Jr-Sheng; Ho, Yen-Teng; Chang, Li ^[1]

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1. Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan (China)

The defects in (134{sup ¯}0)ZnO epitaxial film grown on (114)LaAlO{sub 3} (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[1{sup ¯}21{sup ¯}0] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3〈112{sup ¯}0〉 and 〈0001〉 are distributed on the basal plane. In (134{sup ¯}0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6〈202{sup ¯}3〉 displacement vectors. The densities of dislocations and BSFs are about 3.8 × 10{sup 10} cm{sup −2} and 3.1 × 10{sup 5} cm{sup −1}, respectively.

• OSTI ID: 22258761
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 32, Issue 2; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINATES
BURGERS VECTOR
DEFECTS
DISLOCATIONS
EPITAXY
FILMS
INDIUM 134
LANTHANUM OXIDES
STACKING FAULTS
SUBSTRATES
TRANSMISSION ELECTRON MICROSCOPY
ZINC OXIDES