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Title: Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses

Abstract

Periodic structures were generated on Si and SiC surfaces by irradiation with femtosecond laser pulses. Self-organized structures with spatial periodicity of approximately 600 nm appear on silicon and silicon carbide in the laser fluence range just above the ablation threshold and upon irradiation with a large number of pulses. As in the case of metals, the dependence of the spatial periodicity on laser fluence can be explained by the parametric decay of laser light into surface plasma waves. The results show that the proposed model might be universally applicable to any solid state material.

Authors:
 [1]; ; ; ; ; ;  [1];  [2];  [3]
  1. Advanced Research Center for beam Science, Institute for Chemical Research, Kyoto University, 611-0011 Kyoto (Japan)
  2. FNSPE, Czech Technical University in Prague, 11519 Prague (Czech Republic)
  3. HiLASE Project, Institute of Physics, ASCR, 18221 Prague (Czech Republic)
Publication Date:
OSTI Identifier:
22258757
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 114; Journal Issue: 19; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; ABLATION; DECAY; IRRADIATION; LASERS; METALS; NANOSTRUCTURES; PERIODICITY; PLASMA WAVES; SILICON; SILICON CARBIDES

Citation Formats

Gemini, Laura, Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto, FNSPE, Czech Technical University in Prague, 11519 Prague, HiLASE Project, Institute of Physics, ASCR, 18221 Prague, Hashida, Masaki, Shimizu, Masahiro, Miyasaka, Yasuhiro, Inoue, Shunsuke, Tokita, Shigeki, Sakabe, Shuji, Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto, Limpouch, Jiri, and Mocek, Tomas. Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses. United States: N. p., 2013. Web. doi:10.1063/1.4832829.
Gemini, Laura, Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto, FNSPE, Czech Technical University in Prague, 11519 Prague, HiLASE Project, Institute of Physics, ASCR, 18221 Prague, Hashida, Masaki, Shimizu, Masahiro, Miyasaka, Yasuhiro, Inoue, Shunsuke, Tokita, Shigeki, Sakabe, Shuji, Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto, Limpouch, Jiri, & Mocek, Tomas. Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses. United States. https://doi.org/10.1063/1.4832829
Gemini, Laura, Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto, FNSPE, Czech Technical University in Prague, 11519 Prague, HiLASE Project, Institute of Physics, ASCR, 18221 Prague, Hashida, Masaki, Shimizu, Masahiro, Miyasaka, Yasuhiro, Inoue, Shunsuke, Tokita, Shigeki, Sakabe, Shuji, Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto, Limpouch, Jiri, and Mocek, Tomas. 2013. "Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses". United States. https://doi.org/10.1063/1.4832829.
@article{osti_22258757,
title = {Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses},
author = {Gemini, Laura and Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto and FNSPE, Czech Technical University in Prague, 11519 Prague and HiLASE Project, Institute of Physics, ASCR, 18221 Prague and Hashida, Masaki and Shimizu, Masahiro and Miyasaka, Yasuhiro and Inoue, Shunsuke and Tokita, Shigeki and Sakabe, Shuji and Department of Physics, Graduate School of Science, Kyoto University, 606-85802 Kyoto and Limpouch, Jiri and Mocek, Tomas},
abstractNote = {Periodic structures were generated on Si and SiC surfaces by irradiation with femtosecond laser pulses. Self-organized structures with spatial periodicity of approximately 600 nm appear on silicon and silicon carbide in the laser fluence range just above the ablation threshold and upon irradiation with a large number of pulses. As in the case of metals, the dependence of the spatial periodicity on laser fluence can be explained by the parametric decay of laser light into surface plasma waves. The results show that the proposed model might be universally applicable to any solid state material.},
doi = {10.1063/1.4832829},
url = {https://www.osti.gov/biblio/22258757}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 19,
volume = 114,
place = {United States},
year = {Thu Nov 21 00:00:00 EST 2013},
month = {Thu Nov 21 00:00:00 EST 2013}
}