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Title: Wake-up effects in Si-doped hafnium oxide ferroelectric thin films

Abstract

Hafnium oxide based ferroelectric thin films have shown potential as a promising alternative material for non-volatile memory applications. This work reports the switching stability of a Si-doped HfO{sub 2} film under bipolar pulsed-field operation. High field cycling causes a “wake-up” in virgin “pinched” polarization hysteresis loops, demonstrated by an enhancement in remanent polarization and a shift of negative coercive voltage. The rate of wake-up is accelerated by either reducing the frequency or increasing the amplitude of the cycling field. We suggest de-pinning of domains due to reduction of the defect concentration at bottom electrode interface as origin of the wake-up.

Authors:
 [1];  [2]; ;  [1]; ;  [3];  [4]; ;  [5]
  1. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024 (China)
  2. Department of Electronic Engineering, Dalian Neusoft University of Information, Dalian 116023 (China)
  3. Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050 (China)
  4. Fraunhofer IPMS-CNT, Koengisbruecker Strasse 180, 01109 Dresden (Germany)
  5. Namlab gGmbH/TU Dresden, Noethnitzer Strasse 64, 01187 Dresden (Germany)
Publication Date:
OSTI Identifier:
22254140
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 103; Journal Issue: 19; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DOPED MATERIALS; FERROELECTRIC MATERIALS; HAFNIUM OXIDES; THIN FILMS

Citation Formats

Zhou, Dayu, Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, Xu, Jin, Li, Qing, Guan, Yan, Cao, Fei, Dong, Xianlin, Müller, Johannes, Schenk, Tony, and Schröder, Uwe. Wake-up effects in Si-doped hafnium oxide ferroelectric thin films. United States: N. p., 2013. Web. doi:10.1063/1.4829064.
Zhou, Dayu, Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, Xu, Jin, Li, Qing, Guan, Yan, Cao, Fei, Dong, Xianlin, Müller, Johannes, Schenk, Tony, & Schröder, Uwe. Wake-up effects in Si-doped hafnium oxide ferroelectric thin films. United States. https://doi.org/10.1063/1.4829064
Zhou, Dayu, Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, Xu, Jin, Li, Qing, Guan, Yan, Cao, Fei, Dong, Xianlin, Müller, Johannes, Schenk, Tony, and Schröder, Uwe. 2013. "Wake-up effects in Si-doped hafnium oxide ferroelectric thin films". United States. https://doi.org/10.1063/1.4829064.
@article{osti_22254140,
title = {Wake-up effects in Si-doped hafnium oxide ferroelectric thin films},
author = {Zhou, Dayu and Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024 and State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054 and Xu, Jin and Li, Qing and Guan, Yan and Cao, Fei and Dong, Xianlin and Müller, Johannes and Schenk, Tony and Schröder, Uwe},
abstractNote = {Hafnium oxide based ferroelectric thin films have shown potential as a promising alternative material for non-volatile memory applications. This work reports the switching stability of a Si-doped HfO{sub 2} film under bipolar pulsed-field operation. High field cycling causes a “wake-up” in virgin “pinched” polarization hysteresis loops, demonstrated by an enhancement in remanent polarization and a shift of negative coercive voltage. The rate of wake-up is accelerated by either reducing the frequency or increasing the amplitude of the cycling field. We suggest de-pinning of domains due to reduction of the defect concentration at bottom electrode interface as origin of the wake-up.},
doi = {10.1063/1.4829064},
url = {https://www.osti.gov/biblio/22254140}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 19,
volume = 103,
place = {United States},
year = {Mon Nov 04 00:00:00 EST 2013},
month = {Mon Nov 04 00:00:00 EST 2013}
}