Closed-looped in situ nano processing on a culturing cell using an inverted electron beam lithography system
Abstract
Highlights: ► An electron beam lithography (EBL) was used as an in situ nano processing for a living cell. ► A synchronized optics was containing an inverted EBL and an optical microscope. ► This system visualized real-time images of the EB-induced nano processing. ► We demonstrated the nano processing for a culturing cell with 200–300 nm resolution. ► Our system would be able to provide high resolution display of virtual environments. -- Abstract: The beam profile of an electron beam (EB) can be focused onto less than a nanometer spot and scanned over a wide field with extremely high speed sweeping. Thus, EB is employed for nano scale lithography in applied physics research studies and in fabrication of semiconductors. We applied a scanning EB as a control system for a living cell membrane which is representative of large scale complex systems containing nanometer size components. First, we designed the opposed co-axial dual optics containing inverted electron beam lithography (I-EBL) system and a fluorescent optical microscope. This system could provide in situ nano processing for a culturing living cell on a 100-nm-thick SiN nanomembrane, which was placed between the I-EBL and the fluorescent optical microscope. Then we demonstrated the EB-induced chemicalmore »
- Authors:
-
- Graduate School of Information Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656 (Japan)
- Publication Date:
- OSTI Identifier:
- 22239515
- Resource Type:
- Journal Article
- Journal Name:
- Biochemical and Biophysical Research Communications
- Additional Journal Information:
- Journal Volume: 432; Journal Issue: 2; Other Information: Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0006-291X
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 60 APPLIED LIFE SCIENCES; CELL CULTURES; CELL MEMBRANES; ELECTRON BEAMS; FLUORESCENCE; MOLECULAR DYNAMICS METHOD; OPTICAL MICROSCOPES
Citation Formats
Hoshino, Takayuki, and Mabuchi, Kunihiko. Closed-looped in situ nano processing on a culturing cell using an inverted electron beam lithography system. United States: N. p., 2013.
Web. doi:10.1016/J.BBRC.2013.01.100.
Hoshino, Takayuki, & Mabuchi, Kunihiko. Closed-looped in situ nano processing on a culturing cell using an inverted electron beam lithography system. United States. https://doi.org/10.1016/J.BBRC.2013.01.100
Hoshino, Takayuki, and Mabuchi, Kunihiko. 2013.
"Closed-looped in situ nano processing on a culturing cell using an inverted electron beam lithography system". United States. https://doi.org/10.1016/J.BBRC.2013.01.100.
@article{osti_22239515,
title = {Closed-looped in situ nano processing on a culturing cell using an inverted electron beam lithography system},
author = {Hoshino, Takayuki and Mabuchi, Kunihiko},
abstractNote = {Highlights: ► An electron beam lithography (EBL) was used as an in situ nano processing for a living cell. ► A synchronized optics was containing an inverted EBL and an optical microscope. ► This system visualized real-time images of the EB-induced nano processing. ► We demonstrated the nano processing for a culturing cell with 200–300 nm resolution. ► Our system would be able to provide high resolution display of virtual environments. -- Abstract: The beam profile of an electron beam (EB) can be focused onto less than a nanometer spot and scanned over a wide field with extremely high speed sweeping. Thus, EB is employed for nano scale lithography in applied physics research studies and in fabrication of semiconductors. We applied a scanning EB as a control system for a living cell membrane which is representative of large scale complex systems containing nanometer size components. First, we designed the opposed co-axial dual optics containing inverted electron beam lithography (I-EBL) system and a fluorescent optical microscope. This system could provide in situ nano processing for a culturing living cell on a 100-nm-thick SiN nanomembrane, which was placed between the I-EBL and the fluorescent optical microscope. Then we demonstrated the EB-induced chemical direct nano processing for a culturing cell with hundreds of nanometer resolution and visualized real-time images of the scanning spot of the EB-induced luminescent emission and chemical processing using a high sensitive camera mounted on the optical microscope. We concluded that our closed-loop in situ nano processing would be able to provide a nanometer resolution display of virtual molecule environments to study functional changes of bio-molecule systems.},
doi = {10.1016/J.BBRC.2013.01.100},
url = {https://www.osti.gov/biblio/22239515},
journal = {Biochemical and Biophysical Research Communications},
issn = {0006-291X},
number = 2,
volume = 432,
place = {United States},
year = {Fri Mar 08 00:00:00 EST 2013},
month = {Fri Mar 08 00:00:00 EST 2013}
}