Evolution of different structural phases of TiO{sub 2} films with oxygen partial pressure and Fe doping and their electrical properties
- UGC-DAE Consortium for Scientific Research, Khandwa Road, Indore 452001 (India)
Highlights: ► Fe doped and undoped TiO{sub 2} films are grown with varying oxygen partial pressure (OPP). ► Different structural and electrical phases of TiO{sub 2} films evolve with OPP. ► Phases obtained at different OPP are not same for films with different Fe doping. ► XPS confirms Fe is not in metal cluster form. ► Charge ordering is observed in magneli phase of Fe doped and undoped TiO{sub 2} films. -- Abstract: We have studied the influence of oxygen partial pressure (OPP; 250 mTorr–1 × 10{sup −5} Torr) and Fe doping (2 and 4 at.%) on structural and electrical properties of TiO{sub 2} thin films on LaAlO{sub 3} substrates. X-ray photoelectron spectroscopy suggests that Fe is not in metal cluster form. It is found that the evolution of the three phases; anatase, rutile and brookite of TiO{sub 2} as well as the magneli phase (Ti{sub n}O{sub 2n−1}) strongly depends on the OPP and Fe doping concentration. All the films grown at 250 mTorr show insulating behavior, whereas films grown at 1 × 10{sup −2} and 1 × 10{sup −4} Torr reveal high temperature metallic to low temperature semiconducting transition. Interestingly, films deposited at 1 × 10{sup −5} Torr reveal charge ordering, which is contributed to the magneli phase of TiO{sub 2}. The present study suggests that functionality of TiO{sub 2} thin film based devices can be tuned by properly selecting the OPP and dopant concentration.
- OSTI ID:
- 22215180
- Journal Information:
- Materials Research Bulletin, Vol. 47, Issue 8; Other Information: Copyright (c) 2012 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA); ISSN 0025-5408
- Country of Publication:
- United States
- Language:
- English
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