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Title: Synthesis, crystal structure and thermal decomposition of [La{sub 2}(CH{sub 3}CH{sub 2}COO){sub 6}.(H{sub 2}O){sub 3}].3.5H{sub 2}O precursor for high-k La{sub 2}O{sub 3} thin films deposition

Abstract

Lanthanum acetylacetonate La(C{sub 5}H{sub 7}O{sub 2}){sub 3}.xH{sub 2}O has been used in the preparation of the precursor solution for the deposition of polycrystalline La{sub 2}O{sub 3} thin films on Si(1 1 1) single crystalline substrates. The precursor chemistry of the as-prepared coating solution, precursor powder and precursor single crystal have been investigated by Fourier Transformed Infrared Spectroscopy (FTIR), differential thermal analysis coupled with quadrupole mass spectrometry (TG-DTA-QMS) and X-ray diffraction. The FTIR and X-ray diffraction analyses have revealed the complex nature of the coating solution due to the formation of a lanthanum propionate complex. The La{sub 2}O{sub 3} thin films deposited by spin coating on Si(1 1 1) substrate exhibit good morphological and structural properties. The films heat treated at 800 {sup o}C crystallize in a hexagonal phase with the lattice parameters a = 3,89 A and c = 6.33 A, while at 900 {sup o}C the films contain both the hexagonal and cubic La{sub 2}O{sub 3} phase.

Authors:
; ; ;  [1];  [2];  [1]
  1. Materials Science Laboratory, Technical University of Cluj-Napoca, Str. C. Daicoviciu 15, Cluj-Napoca (Romania)
  2. Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Cluj-Napoca (Romania)
Publication Date:
OSTI Identifier:
22207378
Resource Type:
Journal Article
Journal Name:
Materials Research Bulletin
Additional Journal Information:
Journal Volume: 45; Journal Issue: 9; Other Information: Copyright (c) 2010 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0025-5408
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CRYSTAL STRUCTURE; DEPOSITS; DIFFERENTIAL THERMAL ANALYSIS; FOURIER TRANSFORM SPECTROMETERS; FOURIER TRANSFORMATION; HEAT TREATMENTS; INFRARED SPECTRA; LANTHANUM; LANTHANUM OXIDES; LATTICE PARAMETERS; MASS SPECTROSCOPY; MONOCRYSTALS; POLYCRYSTALS; POWDERS; PRECURSOR; PYROLYSIS; SUBSTRATES; THERMAL GRAVIMETRIC ANALYSIS; THIN FILMS; X-RAY DIFFRACTION

Citation Formats

Ciontea, L., E-mail: Lelia.Ciontea@chem.utcluj.ro, Nasui, M., Petrisor, T., Mos, R. B., Gabor, M. S., Varga, R. A., and Petrisor, T. Synthesis, crystal structure and thermal decomposition of [La{sub 2}(CH{sub 3}CH{sub 2}COO){sub 6}.(H{sub 2}O){sub 3}].3.5H{sub 2}O precursor for high-k La{sub 2}O{sub 3} thin films deposition. United States: N. p., 2010. Web. doi:10.1016/J.MATERRESBULL.2010.05.019.
Ciontea, L., E-mail: Lelia.Ciontea@chem.utcluj.ro, Nasui, M., Petrisor, T., Mos, R. B., Gabor, M. S., Varga, R. A., & Petrisor, T. Synthesis, crystal structure and thermal decomposition of [La{sub 2}(CH{sub 3}CH{sub 2}COO){sub 6}.(H{sub 2}O){sub 3}].3.5H{sub 2}O precursor for high-k La{sub 2}O{sub 3} thin films deposition. United States. https://doi.org/10.1016/J.MATERRESBULL.2010.05.019
Ciontea, L., E-mail: Lelia.Ciontea@chem.utcluj.ro, Nasui, M., Petrisor, T., Mos, R. B., Gabor, M. S., Varga, R. A., and Petrisor, T. 2010. "Synthesis, crystal structure and thermal decomposition of [La{sub 2}(CH{sub 3}CH{sub 2}COO){sub 6}.(H{sub 2}O){sub 3}].3.5H{sub 2}O precursor for high-k La{sub 2}O{sub 3} thin films deposition". United States. https://doi.org/10.1016/J.MATERRESBULL.2010.05.019.
@article{osti_22207378,
title = {Synthesis, crystal structure and thermal decomposition of [La{sub 2}(CH{sub 3}CH{sub 2}COO){sub 6}.(H{sub 2}O){sub 3}].3.5H{sub 2}O precursor for high-k La{sub 2}O{sub 3} thin films deposition},
author = {Ciontea, L., E-mail: Lelia.Ciontea@chem.utcluj.ro and Nasui, M. and Petrisor, T. and Mos, R. B. and Gabor, M. S. and Varga, R. A. and Petrisor, T.},
abstractNote = {Lanthanum acetylacetonate La(C{sub 5}H{sub 7}O{sub 2}){sub 3}.xH{sub 2}O has been used in the preparation of the precursor solution for the deposition of polycrystalline La{sub 2}O{sub 3} thin films on Si(1 1 1) single crystalline substrates. The precursor chemistry of the as-prepared coating solution, precursor powder and precursor single crystal have been investigated by Fourier Transformed Infrared Spectroscopy (FTIR), differential thermal analysis coupled with quadrupole mass spectrometry (TG-DTA-QMS) and X-ray diffraction. The FTIR and X-ray diffraction analyses have revealed the complex nature of the coating solution due to the formation of a lanthanum propionate complex. The La{sub 2}O{sub 3} thin films deposited by spin coating on Si(1 1 1) substrate exhibit good morphological and structural properties. The films heat treated at 800 {sup o}C crystallize in a hexagonal phase with the lattice parameters a = 3,89 A and c = 6.33 A, while at 900 {sup o}C the films contain both the hexagonal and cubic La{sub 2}O{sub 3} phase.},
doi = {10.1016/J.MATERRESBULL.2010.05.019},
url = {https://www.osti.gov/biblio/22207378}, journal = {Materials Research Bulletin},
issn = {0025-5408},
number = 9,
volume = 45,
place = {United States},
year = {Wed Sep 15 00:00:00 EDT 2010},
month = {Wed Sep 15 00:00:00 EDT 2010}
}