Formation mechanisms of embedded nanocrystals in SiN{sub x}
- Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States)
- Department of Physics, University of Michigan, Ann Arbor, Michigan 48109 (United States)
We have investigated the formation of embedded nanocrystals (NCs) in SiN{sub x} using Ga{sup +} focused-ion beam irradiation of SiN{sub x} membranes, followed by rapid thermal annealing (RTA). During irradiation, redeposition is enhanced by developing side walls, leading to enhanced near-surface [Ga] and [Si]. Subsequent RTA leads to the formation of Si and Ga NCs embedded in SiN{sub x}. When the ratio of the irradiated area to the sidewall area is increased, redeposition is limited, and SiN{sub x} and GaN NCs are also apparent. We discuss the effect of limited redeposition on NC formation and the catalytic effect of Ga on Si NC nucleation and growth.
- OSTI ID:
- 22163044
- Journal Information:
- Applied Physics Letters, Vol. 102, Issue 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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