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Title: Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process

Abstract

Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device.

Authors:
; ;  [1];  [2]
+ Show Author Affiliations
  1. Laser Component Department, Laser Zentrum Hannover e.V., Hollerithallee 8, 30149 Hannover (Germany)
  2. (Germany)
Publication Date:
OSTI Identifier:
22162963
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 102; Journal Issue: 22; Other Information: (c) 2013 Copyright-Sign 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BEAMS; DEPOSITION; DISTRIBUTION; ELECTRIC FIELDS; ELECTROMAGNETIC FIELDS; ION BEAMS; MAGNETIC FIELDS; MODIFICATIONS; PLASMA; SILICON; SOLENOIDS; SPUTTERING; TITANIUM

Citation Formats

Malobabic, Sina, Jupe, Marco, Ristau, Detlev, and Quest: Centre of Quantum Engineering and Space-Time Research, Leibniz Universitaet Hannover, Hannover. Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process. United States: N. p., 2013. Web. doi:10.1063/1.4807793.
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Malobabic, Sina, Jupe, Marco, Ristau, Detlev, & Quest: Centre of Quantum Engineering and Space-Time Research, Leibniz Universitaet Hannover, Hannover. Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process. United States. doi:10.1063/1.4807793.
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Malobabic, Sina, Jupe, Marco, Ristau, Detlev, and Quest: Centre of Quantum Engineering and Space-Time Research, Leibniz Universitaet Hannover, Hannover. Mon . "Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process". United States. doi:10.1063/1.4807793.
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@article{osti_22162963,
title = {Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process},
author = {Malobabic, Sina and Jupe, Marco and Ristau, Detlev and Quest: Centre of Quantum Engineering and Space-Time Research, Leibniz Universitaet Hannover, Hannover},
abstractNote = {Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device.},
doi = {10.1063/1.4807793},
journal = {Applied Physics Letters},
number = 22,
volume = 102,
place = {United States},
year = {Mon Jun 03 00:00:00 EDT 2013},
month = {Mon Jun 03 00:00:00 EDT 2013}
}
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Journal Article:
DOI:  10.1063/1.4807793
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    (Ba{sub 0.5},Sr{sub 0.5})TiO{sub 3} (BST) thin films were deposited on MgO, Si, SiO{sub 2} and Ir surfaces by ion beam sputter deposition in oxygen at 700&hthinsp;{degree}C. {ital In situ} spectroscopic ellipsometry (SE) has been used to investigate the evolution of the BST films on different surfaces during both deposition and postannealing processes. First, the optical constants of the BST films in the photon energy range of 1.5{endash}4.5 eV were determined by SE analysis on crystallized BST films deposited on MgO single crystal substrates. The interfaces in BST/Si and BST/SiO{sub 2}/Si structure were examined by SE and Auger electron spectroscopy depthmore » profiles. Subcutaneous oxidation in the BST/Ir structure was observed by {ital in situ} SE during both ion beam sputter deposition and postdeposition annealing in oxygen at 700&hthinsp;{degree}C. A study of the thermal stability of the Ir/TiN/SiO{sub 2}/Si structure in oxygen at 700&hthinsp;{degree}C was carried out using {ital in situ} SE. The oxidation of Ir was confirmed by x-ray diffraction. The surface composition and morphology evolution after oxidation were investigated by time of flight mass spectroscopy of recoiled ions (TOF-MSRI) and atomic force microscopy. It has been found that Ti from the underlying TiN barrier layer diffused through the Ir layer onto the surface and thereupon became oxidized. It was also shown that the surface roughness increases with increasing oxidation time. The implications of the instability of Ir/TiN/SiO{sub 2}/Si structure on the performance of capacitor devices based on this substrate are discussed. It has been shown that a combination of {ital in situ} SE and TOF-MSRI provides a powerful methodology for {ital in situ} monitoring of complex oxide film growth and postannealing processes. {copyright} {ital 1999 American Vacuum Society.}« less

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