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Title: The effect of dielectric confinement on photoluminescence of In{sub 2}O{sub 3}-SiO{sub 2} nanocomposite thin films incorporated by nitrogen

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4803877· OSTI ID:22162910
;  [1]
  1. Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, 30010 Taiwan (China)

Nanocomposite thin films containing In{sub 2}O{sub 3} nanoparticles were prepared by the target-attachment sputtering utilizing the InN pellets and allowing the N{sub 2} inlet gas flow during the deposition process. The x-ray photoelectron spectroscopy revealed that the chemical composition of In{sub 2}O{sub 3} nanoparticles becomes InO{sub x}N{sub y} and the SiO{sub x}N{sub y} phase forms in the matrix of nanocomposite layer. Photoluminescence analysis indicated that the dielectric confinement effect induced by the N-incorporation tends to restrain the green emission of nanocomposite layers due to the presence of surface polarization on nanoparticles. Suppression of blue emission was also observed due to the elimination of oxygen vacancies in In{sub 2}O{sub 3} nanoparticles. Furthermore, the N elements might occupy the oxygen lattice sites and generate a new defect level, N{sub O}{sup -}, to induce the violet emission. Analytical results confirmed the mechanisms of green and blue emissions of the nanocomposite thin films containing In{sub 2}O{sub 3} nanoparticles reported previously.

OSTI ID:
22162910
Journal Information:
Journal of Applied Physics, Vol. 113, Issue 18; Other Information: (c) 2013 Copyright-Sign 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English