Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films
- Measurement Solution Research Center, National Institute of Advanced Industrials Science and Technology, Tosu, Saga 841-0052 (Japan)
- Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555 (Japan)
The authors have investigated the influence of scandium concentration on the power generation figure of merit (FOM) of scandium aluminum nitride (Sc{sub x}Al{sub 1-x}N) films prepared by cosputtering. The power generation FOM strongly depends on the scandium concentration. The FOM of Sc{sub 0.41}Al{sub 0.59}N film was 67 GPa, indicating that the FOM is five times larger than that of AlN. The FOM of Sc{sub 0.41}Al{sub 0.59}N film is higher than those of lead zirconate titanate and Pb(Mg{sub 1/3}Nb{sub 2/3})O{sub 3}-PbTiO{sub 3} films, which is the highest reported for any piezoelectric thin films. The high FOM of Sc{sub 0.41}Al{sub 0.59}N film is due to the high d{sub 31} and the low relative permittivity.
- OSTI ID:
- 22162670
- Journal Information:
- Applied Physics Letters, Vol. 102, Issue 2; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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