Criteria of radio-frequency ring-shaped hollow cathode discharge using H{sub 2} and Ar gases for plasma processing
- Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Saga University, 1 Honjo-machi, Saga 840-8502 (Japan)
In order to achieve high-density capacitively coupled plasma, a radio-frequency (RF) ring-shaped hollow cathode discharge has been developed as a candidate for processing plasma sources. The plasma density in the hollow cathode discharge reaches a high magnitude of 10{sup 10}-10{sup 11} cm{sup -3}. The RF ring-shaped hollow cathode discharge depends on the pressure and mass of the working gas. Criteria required for producing a RF ring-shaped hollow cathode discharge have been investigated for various gas pressures using H{sub 2} and Ar gases for high-density plasma production. The results reveal that the criteria for the occurrence of the hollow cathode effect are that the trench width should be approximately equal to the sum of the electron-neutral mean free paths and twice the sheath thickness of the RF powered electrode.
- OSTI ID:
- 22102217
- Journal Information:
- Journal of Applied Physics, Vol. 113, Issue 3; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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