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Title: Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber

Abstract

Here, the integration of a low energy, linearly variable ion beam current density, mechanically in situ adjustable broad beam ion source with a high-temperature x-ray diffraction (XRD) vacuum chamber is reported. This allows in situ XRD investigation of phase formation and evolution processes induced by low energy ion implantation. Special care has been taken to an independent adjustment of the ion beam for geometrical directing towards the substrate, a 15 mm small ion source exit aperture to avoid a secondary sputter process of the chamber walls, linearly variable ion current density by using a pulse length modulation (PLM) for the accelerating voltages without changing the ion beam density profile, nearly homogeneous ion beam distribution over the x-ray footprint, together with easily replaceable Kapton{sup Registered-Sign} windows for x-rays entry and exit. By combining a position sensitive x-ray detector with this PLM-modulated ion beam, a fast and efficient time resolved investigation of low energy implantation processes is obtained in a compact experimental setup.

Authors:
; ; ; ;  [1]
  1. Leibniz-Institut fuer Oberflaechenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig (Germany)
Publication Date:
OSTI Identifier:
22093988
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 83; Journal Issue: 11; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; APERTURES; CURRENT DENSITY; DISTRIBUTION; EVOLUTION; ION BEAMS; ION IMPLANTATION; ION SOURCES; IONS; MODULATION; PULSES; SPUTTERING; SUBSTRATES; TIME RESOLUTION; X RADIATION; X-RAY DETECTION; X-RAY DIFFRACTION

Citation Formats

Manova, D., Bergmann, A., Maendl, S., Neumann, H., and Rauschenbach, B. Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber. United States: N. p., 2012. Web. doi:10.1063/1.4765703.
Manova, D., Bergmann, A., Maendl, S., Neumann, H., & Rauschenbach, B. Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber. United States. doi:10.1063/1.4765703.
Manova, D., Bergmann, A., Maendl, S., Neumann, H., and Rauschenbach, B. Thu . "Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber". United States. doi:10.1063/1.4765703.
@article{osti_22093988,
title = {Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber},
author = {Manova, D. and Bergmann, A. and Maendl, S. and Neumann, H. and Rauschenbach, B.},
abstractNote = {Here, the integration of a low energy, linearly variable ion beam current density, mechanically in situ adjustable broad beam ion source with a high-temperature x-ray diffraction (XRD) vacuum chamber is reported. This allows in situ XRD investigation of phase formation and evolution processes induced by low energy ion implantation. Special care has been taken to an independent adjustment of the ion beam for geometrical directing towards the substrate, a 15 mm small ion source exit aperture to avoid a secondary sputter process of the chamber walls, linearly variable ion current density by using a pulse length modulation (PLM) for the accelerating voltages without changing the ion beam density profile, nearly homogeneous ion beam distribution over the x-ray footprint, together with easily replaceable Kapton{sup Registered-Sign} windows for x-rays entry and exit. By combining a position sensitive x-ray detector with this PLM-modulated ion beam, a fast and efficient time resolved investigation of low energy implantation processes is obtained in a compact experimental setup.},
doi = {10.1063/1.4765703},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 11,
volume = 83,
place = {United States},
year = {2012},
month = {11}
}