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Title: High precision deflection measurement of microcantilever in an optical pickup head based atomic force microscopy

Abstract

This paper presents the methodology to measure the precise deflection of microcantilever in an optical pickup head based atomic force microscopy. In this paper, three types of calibration methods have been proposed: full linearization, sectioned linearization, and the method based on astigmatism. In addition, the probe heads for easy calibration of optical pickup head and fast replacement of optical pickup head have been developed. The performances of each method have been compared through a set of experiments and constant height mode operation which was not possible in the optical pickup head based atomic force microscopy has been carried out successfully.

Authors:
 [1]
  1. Department of Mechanical Design Engineering, Andong National University, Andong 760-749 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22093987
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 83; Journal Issue: 11; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; ATOMIC FORCE MICROSCOPY; CALIBRATION; PERFORMANCE

Citation Formats

Lee, Sang Heon. High precision deflection measurement of microcantilever in an optical pickup head based atomic force microscopy. United States: N. p., 2012. Web. doi:10.1063/1.4768459.
Lee, Sang Heon. High precision deflection measurement of microcantilever in an optical pickup head based atomic force microscopy. United States. doi:10.1063/1.4768459.
Lee, Sang Heon. Thu . "High precision deflection measurement of microcantilever in an optical pickup head based atomic force microscopy". United States. doi:10.1063/1.4768459.
@article{osti_22093987,
title = {High precision deflection measurement of microcantilever in an optical pickup head based atomic force microscopy},
author = {Lee, Sang Heon},
abstractNote = {This paper presents the methodology to measure the precise deflection of microcantilever in an optical pickup head based atomic force microscopy. In this paper, three types of calibration methods have been proposed: full linearization, sectioned linearization, and the method based on astigmatism. In addition, the probe heads for easy calibration of optical pickup head and fast replacement of optical pickup head have been developed. The performances of each method have been compared through a set of experiments and constant height mode operation which was not possible in the optical pickup head based atomic force microscopy has been carried out successfully.},
doi = {10.1063/1.4768459},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 11,
volume = 83,
place = {United States},
year = {2012},
month = {11}
}