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Title: Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films

Abstract

Al{sub 2}O{sub 3} thin films, either amorphous or of varying degrees of crystallinity, were deposited by two-frequency radio-frequency magnetron sputtering. Film crystallinity was investigated by Fourier transform infrared spectroscopy and X-ray diffraction (XRD). X-ray photoelectron spectroscopy (XPS) was employed to determine the amount of Ar naturally trapped within the films during the deposition process. A clear correlation was found between the existence of crystalline phases, as determined by XRD, and a shift towards lower binding energy positions of the Ar2p core levels of embedded gas. The shift is due to differences in the local Al{sub 2}O{sub 3} matrix (amorphous or crystalline) of the embedded gas, thus, providing an XPS fingerprint that can be used to qualitatively determine the presence or absence of crystalline phases in very thin films.

Authors:
; ;  [1]; ;  [2]
  1. Research Group Reactive Plasmas, Institute for Experimental Physics II, Faculty of Physics and Astronomy, Ruhr-Universitaet Bochum, Universitaetstr. 150, D-44801 Bochum (Germany)
  2. Application-Oriented Plasma Physics, Institute for Experimental Physics II, Faculty of Physics and Astronomy, Ruhr-Universitaet Bochum, Universitaetstr. 150, D-44801 Bochum (Germany)
Publication Date:
OSTI Identifier:
22089541
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 112; Journal Issue: 10; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM OXIDES; AMORPHOUS STATE; ARGON; BINDING ENERGY; CORRELATIONS; DEPOSITION; FOURIER TRANSFORM SPECTROMETERS; INFRARED SPECTRA; MAGNETRONS; PLASMA; RADIOWAVE RADIATION; SPUTTERING; THIN FILMS; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Prenzel, Marina, Kortmann, Annika, Keudell, Achim von, Arcos, Teresa de los, and Winter, Joerg. Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films. United States: N. p., 2012. Web. doi:10.1063/1.4767383.
Prenzel, Marina, Kortmann, Annika, Keudell, Achim von, Arcos, Teresa de los, & Winter, Joerg. Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films. United States. doi:10.1063/1.4767383.
Prenzel, Marina, Kortmann, Annika, Keudell, Achim von, Arcos, Teresa de los, and Winter, Joerg. Thu . "Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films". United States. doi:10.1063/1.4767383.
@article{osti_22089541,
title = {Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films},
author = {Prenzel, Marina and Kortmann, Annika and Keudell, Achim von and Arcos, Teresa de los and Winter, Joerg},
abstractNote = {Al{sub 2}O{sub 3} thin films, either amorphous or of varying degrees of crystallinity, were deposited by two-frequency radio-frequency magnetron sputtering. Film crystallinity was investigated by Fourier transform infrared spectroscopy and X-ray diffraction (XRD). X-ray photoelectron spectroscopy (XPS) was employed to determine the amount of Ar naturally trapped within the films during the deposition process. A clear correlation was found between the existence of crystalline phases, as determined by XRD, and a shift towards lower binding energy positions of the Ar2p core levels of embedded gas. The shift is due to differences in the local Al{sub 2}O{sub 3} matrix (amorphous or crystalline) of the embedded gas, thus, providing an XPS fingerprint that can be used to qualitatively determine the presence or absence of crystalline phases in very thin films.},
doi = {10.1063/1.4767383},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 10,
volume = 112,
place = {United States},
year = {2012},
month = {11}
}