# Consideration of the electron energy distribution function shape in a Ar and N{sub 2} global model

## Abstract

This paper presents a method to compensate the effects of the electron energy distribution function (EEDF) shape on plasma characteristics when using global models to describe Ar and N{sub 2} inductively coupled discharges. A non-Maxwellian global model is developed for the pressure range 1-1000 mTorr by using an user-friendly Boltzmann equation solver to calculate the EEDF. The calculated EEDFs are compared with the measurements performed with a single Langmuir probe in the same conditions. We also compare the calculated results by using the Boltzmann equation solver with the results by assuming a Maxwellian EEDF and point out the influence of both methods on the contribution of the multi-step process on ionization. Finally, to take into account the shape of the EEDF in global models, abacuses are presented as a function of the absorbed power density and the pressure for typical Ar and N{sub 2} planar ICP discharges.

- Authors:

- Division of Energy Systems Research, Ajou University, Suwon 443-749 (Korea, Republic of)
- Universite de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie), 118 route de Narbonne, F-31062 Toulouse cedex 9 (France)
- (France)

- Publication Date:

- OSTI Identifier:
- 22089540

- Resource Type:
- Journal Article

- Journal Name:
- Journal of Applied Physics

- Additional Journal Information:
- Journal Volume: 112; Journal Issue: 10; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979

- Country of Publication:
- United States

- Language:
- English

- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ARGON; BOLTZMANN EQUATION; COMPARATIVE EVALUATIONS; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRONS; ENERGY SPECTRA; IONIZATION; LANGMUIR PROBE; NITROGEN; PLASMA; PLASMA PRESSURE; POWER DENSITY; PRESSURE RANGE; SIMULATION

### Citation Formats

```
Kang, Namjun, Oh, Soo-Ghee, Gaboriau, Freddy, and CNRS, LAPLACE, F-31062 Toulouse.
```*Consideration of the electron energy distribution function shape in a Ar and N{sub 2} global model*. United States: N. p., 2012.
Web. doi:10.1063/1.4765728.

```
Kang, Namjun, Oh, Soo-Ghee, Gaboriau, Freddy, & CNRS, LAPLACE, F-31062 Toulouse.
```*Consideration of the electron energy distribution function shape in a Ar and N{sub 2} global model*. United States. doi:10.1063/1.4765728.

```
Kang, Namjun, Oh, Soo-Ghee, Gaboriau, Freddy, and CNRS, LAPLACE, F-31062 Toulouse. Thu .
"Consideration of the electron energy distribution function shape in a Ar and N{sub 2} global model". United States. doi:10.1063/1.4765728.
```

```
@article{osti_22089540,
```

title = {Consideration of the electron energy distribution function shape in a Ar and N{sub 2} global model},

author = {Kang, Namjun and Oh, Soo-Ghee and Gaboriau, Freddy and CNRS, LAPLACE, F-31062 Toulouse},

abstractNote = {This paper presents a method to compensate the effects of the electron energy distribution function (EEDF) shape on plasma characteristics when using global models to describe Ar and N{sub 2} inductively coupled discharges. A non-Maxwellian global model is developed for the pressure range 1-1000 mTorr by using an user-friendly Boltzmann equation solver to calculate the EEDF. The calculated EEDFs are compared with the measurements performed with a single Langmuir probe in the same conditions. We also compare the calculated results by using the Boltzmann equation solver with the results by assuming a Maxwellian EEDF and point out the influence of both methods on the contribution of the multi-step process on ionization. Finally, to take into account the shape of the EEDF in global models, abacuses are presented as a function of the absorbed power density and the pressure for typical Ar and N{sub 2} planar ICP discharges.},

doi = {10.1063/1.4765728},

journal = {Journal of Applied Physics},

issn = {0021-8979},

number = 10,

volume = 112,

place = {United States},

year = {2012},

month = {11}

}