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Title: Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes

Abstract

We demonstrate x-ray scanning coherent diffraction microscopy (ptychography) with 10 nm spatial resolution, clearly exceeding the resolution limits of conventional hard x-ray microscopy. The spatial resolution in a ptychogram is shown to depend on the shape (structure factor) of a feature and can vary for different features in the object. In addition, the resolution and contrast are shown to increase with increasing coherent fluence. For an optimal ptychographic x-ray microscope, this implies a source with highest possible brilliance and an x-ray optic with a large numerical aperture to generate the optimal probe beam.

Authors:
; ; ; ; ; ;  [1]; ;  [2]
  1. Institute of Structural Physics, Technische Universitaet Dresden, D-01062 Dresden (Germany)
  2. Deutsches Elektronen-Synchrotron DESY, D-22607 Hamburg (Germany)
Publication Date:
OSTI Identifier:
22080400
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 100; Journal Issue: 25; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; APERTURES; AUGMENTATION; BEAMS; COHERENT RADIATION; HARD X RADIATION; MICROSCOPES; OPTICAL MICROSCOPY; OPTICS; PROBES; SCANNING LIGHT MICROSCOPY; SHAPE; SPATIAL RESOLUTION; STRUCTURE FACTORS; X-RAY DIFFRACTION

Citation Formats

Schropp, A., Hoppe, R., Patommel, J., Samberg, D., Seiboth, F., Stephan, S., Schroer, C. G., Wellenreuther, G., and Falkenberg, G. Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes. United States: N. p., 2012. Web. doi:10.1063/1.4729942.
Schropp, A., Hoppe, R., Patommel, J., Samberg, D., Seiboth, F., Stephan, S., Schroer, C. G., Wellenreuther, G., & Falkenberg, G. Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes. United States. doi:10.1063/1.4729942.
Schropp, A., Hoppe, R., Patommel, J., Samberg, D., Seiboth, F., Stephan, S., Schroer, C. G., Wellenreuther, G., and Falkenberg, G. Mon . "Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes". United States. doi:10.1063/1.4729942.
@article{osti_22080400,
title = {Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes},
author = {Schropp, A. and Hoppe, R. and Patommel, J. and Samberg, D. and Seiboth, F. and Stephan, S. and Schroer, C. G. and Wellenreuther, G. and Falkenberg, G.},
abstractNote = {We demonstrate x-ray scanning coherent diffraction microscopy (ptychography) with 10 nm spatial resolution, clearly exceeding the resolution limits of conventional hard x-ray microscopy. The spatial resolution in a ptychogram is shown to depend on the shape (structure factor) of a feature and can vary for different features in the object. In addition, the resolution and contrast are shown to increase with increasing coherent fluence. For an optimal ptychographic x-ray microscope, this implies a source with highest possible brilliance and an x-ray optic with a large numerical aperture to generate the optimal probe beam.},
doi = {10.1063/1.4729942},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 25,
volume = 100,
place = {United States},
year = {2012},
month = {6}
}