skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Laser-assisted sol-gel growth and characteristics of ZnO thin films

Abstract

ZnO thin films were grown on Si(100) substrates by a sol-gel method assisted by laser beam irradiation with a 325 nm He-Cd laser. In contrast to conventional sol-gel ZnO thin films, the surface morphology of the laser-assisted sol-gel thin films was much smoother, and the residual stress in the films was relaxed by laser irradiation. The luminescent properties of the films were also enhanced by laser irradiation, especially, by irradiation during the deposition and post-heat treatment stages. The incident laser beam is thought to play several roles, such as annihilating defects by accelerating crystallization during heat treatment, enhancing the surface migration of atoms and molecules, and relaxing the ZnO matrix structure during crystallization.

Authors:
;  [1];  [1];  [2]
  1. Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Gimhae 621-749 (Korea, Republic of)
  2. (Korea, Republic of)
Publication Date:
OSTI Identifier:
22080396
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 100; Journal Issue: 25; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CRYSTAL DEFECTS; CRYSTALLIZATION; DEPOSITION; HEAT TREATMENTS; IRRADIATION; LASER RADIATION; LUMINESCENCE; MIGRATION; MOLECULES; RESIDUAL STRESSES; SEMICONDUCTOR MATERIALS; SOL-GEL PROCESS; SUBSTRATES; SURFACES; THIN FILMS; ZINC OXIDES

Citation Formats

Kim, Min Su, Kim, Soaram, Leem, Jae-Young, and Department of Nano Engineering, Inje University, Gimhae 621-749. Laser-assisted sol-gel growth and characteristics of ZnO thin films. United States: N. p., 2012. Web. doi:10.1063/1.4729944.
Kim, Min Su, Kim, Soaram, Leem, Jae-Young, & Department of Nano Engineering, Inje University, Gimhae 621-749. Laser-assisted sol-gel growth and characteristics of ZnO thin films. United States. doi:10.1063/1.4729944.
Kim, Min Su, Kim, Soaram, Leem, Jae-Young, and Department of Nano Engineering, Inje University, Gimhae 621-749. Mon . "Laser-assisted sol-gel growth and characteristics of ZnO thin films". United States. doi:10.1063/1.4729944.
@article{osti_22080396,
title = {Laser-assisted sol-gel growth and characteristics of ZnO thin films},
author = {Kim, Min Su and Kim, Soaram and Leem, Jae-Young and Department of Nano Engineering, Inje University, Gimhae 621-749},
abstractNote = {ZnO thin films were grown on Si(100) substrates by a sol-gel method assisted by laser beam irradiation with a 325 nm He-Cd laser. In contrast to conventional sol-gel ZnO thin films, the surface morphology of the laser-assisted sol-gel thin films was much smoother, and the residual stress in the films was relaxed by laser irradiation. The luminescent properties of the films were also enhanced by laser irradiation, especially, by irradiation during the deposition and post-heat treatment stages. The incident laser beam is thought to play several roles, such as annihilating defects by accelerating crystallization during heat treatment, enhancing the surface migration of atoms and molecules, and relaxing the ZnO matrix structure during crystallization.},
doi = {10.1063/1.4729944},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 25,
volume = 100,
place = {United States},
year = {2012},
month = {6}
}