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Title: Ion beams extraction and measurements of plasma parameters on a multi-frequencies microwaves large bore ECRIS with permanent magnets

Abstract

We have developed an all-permanent magnet large bore electron cyclotron resonance ion source (ECRIS) for broad ion beam processing. The cylindrically comb-shaped magnetic field configuration is adopted for efficient plasma production and good magnetic confinement. To compensate for disadvantages of fixed magnetic configuration, a traveling wave tube amplifier (TWTA) is used. In the comb-shaped ECRIS, it is difficult to achieve controlling ion beam profiles in the whole inside the chamber by using even single frequency-controllable TWTA (11-13GHz), because of large bore size with all-magnets. We have tried controlling profiles of plasma parameters and then those of extracted ion beams by launching two largely different frequencies simultaneously, i.e., multi-frequencies microwaves. Here we report ion beam profiles and corresponding plasma parameters under various experimental conditions, dependence of ion beams against extraction voltages, and influence of different electrode positions on the electron density profile.

Authors:
; ; ; ; ; ; ;  [1]
  1. Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita-shi, Osaka, 565-0871 (Japan)
Publication Date:
OSTI Identifier:
22075727
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1496; Journal Issue: 1; Conference: 19. international conference on ion implantation technology, Valladolid (Spain), 25-29 Jun 2012; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 43 PARTICLE ACCELERATORS; AMPLIFIERS; BEAM EXTRACTION; BEAM PRODUCTION; BEAM PROFILES; BEAM-PLASMA SYSTEMS; ECR ION SOURCES; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON DENSITY; ION BEAMS; MAGNETIC CONFINEMENT; MAGNETIC FIELD CONFIGURATIONS; MICROWAVE RADIATION; PERMANENT MAGNETS; PLASMA; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA PRODUCTION; RF SYSTEMS; TRAVELLING WAVE TUBES

Citation Formats

Nozaki, Dai, Kiriyama, Ryutaro, Takenaka, Tomoya, Kurisu, Yosuke, Yano, Keisuke, Sato, Fuminobu, Kato, Yushi, and Iida, Toshiyuki. Ion beams extraction and measurements of plasma parameters on a multi-frequencies microwaves large bore ECRIS with permanent magnets. United States: N. p., 2012. Web. doi:10.1063/1.4766575.
Nozaki, Dai, Kiriyama, Ryutaro, Takenaka, Tomoya, Kurisu, Yosuke, Yano, Keisuke, Sato, Fuminobu, Kato, Yushi, & Iida, Toshiyuki. Ion beams extraction and measurements of plasma parameters on a multi-frequencies microwaves large bore ECRIS with permanent magnets. United States. doi:10.1063/1.4766575.
Nozaki, Dai, Kiriyama, Ryutaro, Takenaka, Tomoya, Kurisu, Yosuke, Yano, Keisuke, Sato, Fuminobu, Kato, Yushi, and Iida, Toshiyuki. Tue . "Ion beams extraction and measurements of plasma parameters on a multi-frequencies microwaves large bore ECRIS with permanent magnets". United States. doi:10.1063/1.4766575.
@article{osti_22075727,
title = {Ion beams extraction and measurements of plasma parameters on a multi-frequencies microwaves large bore ECRIS with permanent magnets},
author = {Nozaki, Dai and Kiriyama, Ryutaro and Takenaka, Tomoya and Kurisu, Yosuke and Yano, Keisuke and Sato, Fuminobu and Kato, Yushi and Iida, Toshiyuki},
abstractNote = {We have developed an all-permanent magnet large bore electron cyclotron resonance ion source (ECRIS) for broad ion beam processing. The cylindrically comb-shaped magnetic field configuration is adopted for efficient plasma production and good magnetic confinement. To compensate for disadvantages of fixed magnetic configuration, a traveling wave tube amplifier (TWTA) is used. In the comb-shaped ECRIS, it is difficult to achieve controlling ion beam profiles in the whole inside the chamber by using even single frequency-controllable TWTA (11-13GHz), because of large bore size with all-magnets. We have tried controlling profiles of plasma parameters and then those of extracted ion beams by launching two largely different frequencies simultaneously, i.e., multi-frequencies microwaves. Here we report ion beam profiles and corresponding plasma parameters under various experimental conditions, dependence of ion beams against extraction voltages, and influence of different electrode positions on the electron density profile.},
doi = {10.1063/1.4766575},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1496,
place = {United States},
year = {2012},
month = {11}
}