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Title: Comparison between single- and dual-electrode ion source systems for low-energy ion transport

Abstract

Extraction of ions with energies below 100 eV has been demonstrated using a hot-cathode multi-cusp ion source equipped with extraction electrodes made of thin wires. Two electrode geometries, a single-electrode system, and a dual-electrode system were built and tested. The single-electrode configuration showed high ion beam current densities at shorter distances from the electrode but exhibited rapid attenuation as the distance from the electrode increased. Beam angular spread measurements showed similar beam divergence for both electrode configurations at low plasma densities. At high plasma densities and low extraction potentials, the single-electrode system showed the angular spread twice as large as that of the dual-electrode system. Energy distribution analyses showed a broader energy spread for ion beams extracted from a single-electrode set-up.

Authors:
; ; ; ;  [1];  [2];  [2];  [2]
  1. Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321 and Nissin Ion Equipment Co., Ltd. 575 Kuze Tonoshiro-cho, Minami-ku, Kyoto 601-8205 (Japan)
  2. (Japan)
Publication Date:
OSTI Identifier:
22075726
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1496; Journal Issue: 1; Conference: 19. international conference on ion implantation technology, Valladolid (Spain), 25-29 Jun 2012; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ATTENUATION; BEAM EMITTANCE; BEAM EXTRACTION; BEAM PRODUCTION; BEAM PROFILES; BEAM TRANSPORT; CATHODES; COMPARATIVE EVALUATIONS; CURRENT DENSITY; ENERGY SPECTRA; ION BEAMS; ION SOURCES; PARTICLE BEAMS; PLASMA; PLASMA DENSITY; POTENTIALS

Citation Formats

Vasquez, M. Jr., Tokumura, S., Kasuya, T., Maeno, S., Wada, M., Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321, Novelion Systems Co.Ltd., D-Egg, Kyotanabe, Kyoto 610-332, and Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321. Comparison between single- and dual-electrode ion source systems for low-energy ion transport. United States: N. p., 2012. Web. doi:10.1063/1.4766574.
Vasquez, M. Jr., Tokumura, S., Kasuya, T., Maeno, S., Wada, M., Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321, Novelion Systems Co.Ltd., D-Egg, Kyotanabe, Kyoto 610-332, & Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321. Comparison between single- and dual-electrode ion source systems for low-energy ion transport. United States. doi:10.1063/1.4766574.
Vasquez, M. Jr., Tokumura, S., Kasuya, T., Maeno, S., Wada, M., Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321, Novelion Systems Co.Ltd., D-Egg, Kyotanabe, Kyoto 610-332, and Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321. Tue . "Comparison between single- and dual-electrode ion source systems for low-energy ion transport". United States. doi:10.1063/1.4766574.
@article{osti_22075726,
title = {Comparison between single- and dual-electrode ion source systems for low-energy ion transport},
author = {Vasquez, M. Jr. and Tokumura, S. and Kasuya, T. and Maeno, S. and Wada, M. and Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321 and Novelion Systems Co.Ltd., D-Egg, Kyotanabe, Kyoto 610-332 and Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-321},
abstractNote = {Extraction of ions with energies below 100 eV has been demonstrated using a hot-cathode multi-cusp ion source equipped with extraction electrodes made of thin wires. Two electrode geometries, a single-electrode system, and a dual-electrode system were built and tested. The single-electrode configuration showed high ion beam current densities at shorter distances from the electrode but exhibited rapid attenuation as the distance from the electrode increased. Beam angular spread measurements showed similar beam divergence for both electrode configurations at low plasma densities. At high plasma densities and low extraction potentials, the single-electrode system showed the angular spread twice as large as that of the dual-electrode system. Energy distribution analyses showed a broader energy spread for ion beams extracted from a single-electrode set-up.},
doi = {10.1063/1.4766574},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1496,
place = {United States},
year = {2012},
month = {11}
}