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Title: Enhanced life ion source for germanium and carbon ion implantation

Abstract

Germanium and carbon ions represent a significant portion of total ion implantation steps in the process flow. Very often ion source materials that used to produce ions are chemically aggressive, especially at higher temperatures, and result in fast ion source performance degradation and a very limited lifetime [B.S. Freer, et. al., 2002 14th Intl. Conf. on Ion Implantation Technology Proc, IEEE Conf. Proc., p. 420 (2003)]. GeF{sub 4} and CO{sub 2} are commonly used to generate germanium and carbon beams. In the case of GeF{sub 4} controlling the tungsten deposition due to the de-composition of WF{sub 6} (halogen cycle) is critical to ion source life. With CO{sub 2}, the materials oxidation and carbon deposition must be controlled as both will affect cathode thermionic emission and anti-cathode (repeller) efficiencies due to the formation of volatile metal oxides. The improved ion source design Extended Life Source 3 (Eterna ELS3) together with its proprietary co-gas material implementation has demonstrated >300 hours of stable continuous operation when using carbon and germanium ion beams. Optimizing cogas chemistries retard the cathode erosion rate for germanium and carbon minimizes the adverse effects of oxygen when reducing gas is introduced for carbon. The proprietary combination of hardware andmore » co-gas has improved source stability and the results of the hardware and co-gas development are discussed.« less

Authors:
; ;  [1]
  1. Axcelis Technologies, Inc. 108 Cherry Hill Drive, Beverly, MA 01915 (United States)
Publication Date:
OSTI Identifier:
22075722
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1496; Journal Issue: 1; Conference: 19. international conference on ion implantation technology, Valladolid (Spain), 25-29 Jun 2012; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 43 PARTICLE ACCELERATORS; CARBON; CARBON DIOXIDE; CARBON IONS; CATHODES; DEPOSITION; GERMANIUM; GERMANIUM FLUORIDES; GERMANIUM IONS; ION BEAMS; ION IMPLANTATION; ION SOURCES; LIFETIME; OPTIMIZATION; OXIDATION; PERFORMANCE; THERMIONIC EMISSION; TUNGSTEN FLUORIDES

Citation Formats

Hsieh, Tseh-Jen, Colvin, Neil, and Kondratenko, Serguei. Enhanced life ion source for germanium and carbon ion implantation. United States: N. p., 2012. Web. doi:10.1063/1.4766566.
Hsieh, Tseh-Jen, Colvin, Neil, & Kondratenko, Serguei. Enhanced life ion source for germanium and carbon ion implantation. United States. doi:10.1063/1.4766566.
Hsieh, Tseh-Jen, Colvin, Neil, and Kondratenko, Serguei. Tue . "Enhanced life ion source for germanium and carbon ion implantation". United States. doi:10.1063/1.4766566.
@article{osti_22075722,
title = {Enhanced life ion source for germanium and carbon ion implantation},
author = {Hsieh, Tseh-Jen and Colvin, Neil and Kondratenko, Serguei},
abstractNote = {Germanium and carbon ions represent a significant portion of total ion implantation steps in the process flow. Very often ion source materials that used to produce ions are chemically aggressive, especially at higher temperatures, and result in fast ion source performance degradation and a very limited lifetime [B.S. Freer, et. al., 2002 14th Intl. Conf. on Ion Implantation Technology Proc, IEEE Conf. Proc., p. 420 (2003)]. GeF{sub 4} and CO{sub 2} are commonly used to generate germanium and carbon beams. In the case of GeF{sub 4} controlling the tungsten deposition due to the de-composition of WF{sub 6} (halogen cycle) is critical to ion source life. With CO{sub 2}, the materials oxidation and carbon deposition must be controlled as both will affect cathode thermionic emission and anti-cathode (repeller) efficiencies due to the formation of volatile metal oxides. The improved ion source design Extended Life Source 3 (Eterna ELS3) together with its proprietary co-gas material implementation has demonstrated >300 hours of stable continuous operation when using carbon and germanium ion beams. Optimizing cogas chemistries retard the cathode erosion rate for germanium and carbon minimizes the adverse effects of oxygen when reducing gas is introduced for carbon. The proprietary combination of hardware and co-gas has improved source stability and the results of the hardware and co-gas development are discussed.},
doi = {10.1063/1.4766566},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1496,
place = {United States},
year = {2012},
month = {11}
}