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Title: Beam energy tracking system on Optima XEx high energy ion implanter

Abstract

The Axcelis Optima XEx high energy implanter is an RF linac-based implanter with 12 RF resonators for beam acceleration. Even though each acceleration field is an alternating, sinusoidal RF field, the well known phase-focusing principle produces a beam with a sharp quasi-monoenergetic energy spectrum. A magnetic energy filter after the linac further attenuates the low energy continuum in the energy spectrum often associated with RF acceleration. The final beam energy is a function of the phase and amplitude of the 12 resonators in the linac. When tuning a beam, the magnetic energy filter is set to the desired energy, and each linac parameter is tuned to maximize the transmission through the filter. Once a beam is set up, all the parameters are stored in a recipe, which can be easily tuned and has proven to be quite repeatable. The magnetic field setting of the energy filter selects the beam energy from the RF Linac accelerator, and in-situ verification of beam energy in addition to the magnetic energy filter setting has long been desired. An independent energy tracking system was developed for this purpose, using the existing electrostatic beam scanner as a deflector to construct an in-situ electrostatic energy analyzer. Thismore » paper will describe the system and performance of the beam energy tracking system.« less

Authors:
; ; ; ;  [1]
  1. Axcelis Technologies, Inc., 108 Cherry Hill Dr, Beverly, MA 01915 (United States)
Publication Date:
OSTI Identifier:
22075720
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1496; Journal Issue: 1; Conference: 19. international conference on ion implantation technology, Valladolid (Spain), 25-29 Jun 2012; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; ACCELERATION; BEAM CURRENTS; BEAM FOCUSING MAGNETS; BEAM OPTICS; BEAM PRODUCTION; BEAM SCANNERS; ENERGY SPECTRA; ION BEAMS; ION IMPLANTATION; LINEAR ACCELERATORS; MAGNETIC FIELDS; PARTICLE BEAMS; PERFORMANCE; RESONATORS; RF SYSTEMS

Citation Formats

David, Jonathan, Satoh, Shu, Wu Xiangyang, Geary, Cindy, and Deluca, James. Beam energy tracking system on Optima XEx high energy ion implanter. United States: N. p., 2012. Web. doi:10.1063/1.4766564.
David, Jonathan, Satoh, Shu, Wu Xiangyang, Geary, Cindy, & Deluca, James. Beam energy tracking system on Optima XEx high energy ion implanter. United States. doi:10.1063/1.4766564.
David, Jonathan, Satoh, Shu, Wu Xiangyang, Geary, Cindy, and Deluca, James. Tue . "Beam energy tracking system on Optima XEx high energy ion implanter". United States. doi:10.1063/1.4766564.
@article{osti_22075720,
title = {Beam energy tracking system on Optima XEx high energy ion implanter},
author = {David, Jonathan and Satoh, Shu and Wu Xiangyang and Geary, Cindy and Deluca, James},
abstractNote = {The Axcelis Optima XEx high energy implanter is an RF linac-based implanter with 12 RF resonators for beam acceleration. Even though each acceleration field is an alternating, sinusoidal RF field, the well known phase-focusing principle produces a beam with a sharp quasi-monoenergetic energy spectrum. A magnetic energy filter after the linac further attenuates the low energy continuum in the energy spectrum often associated with RF acceleration. The final beam energy is a function of the phase and amplitude of the 12 resonators in the linac. When tuning a beam, the magnetic energy filter is set to the desired energy, and each linac parameter is tuned to maximize the transmission through the filter. Once a beam is set up, all the parameters are stored in a recipe, which can be easily tuned and has proven to be quite repeatable. The magnetic field setting of the energy filter selects the beam energy from the RF Linac accelerator, and in-situ verification of beam energy in addition to the magnetic energy filter setting has long been desired. An independent energy tracking system was developed for this purpose, using the existing electrostatic beam scanner as a deflector to construct an in-situ electrostatic energy analyzer. This paper will describe the system and performance of the beam energy tracking system.},
doi = {10.1063/1.4766564},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1496,
place = {United States},
year = {2012},
month = {11}
}