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Title: Phosphorous transient enhanced diffusion suppression and activation enhancement with cluster carbon co-implantation

Abstract

Carbon co-implantation is well known as an effective method for suppressing boron/phosphorous transient enhanced diffusion (TED). Germanium pre-amorphization implantation (PAI) is usually applied prior to carbon co-implantation for suppressing channeling tail of dopants. In this study, cluster carbon was applied instead of the combination of germanium PAI and monomer carbon co-implantation prior to phosphorous implantation. Dependence of phosphorous activation and TED on amorphous layer thickness, carbon dose, carbon distribution and substrate temperature have been investigated. Cluster carbon implantation enables thick amorphous layer formation and TED suppression at the same time and low temperature implantation enhances the ability of amorphous layer formation so that shallow junction and low Rs can be achieved without Ge implantation.

Authors:
; ; ; ; ; ; ;  [1]
  1. Nissin Ion Equipment Co., Ltd., 575 Kuze Tonoshiro-cho, Minami-ku, Kyoto, 601-8205 (Japan)
Publication Date:
OSTI Identifier:
22075699
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1496; Journal Issue: 1; Conference: 19. international conference on ion implantation technology, Valladolid (Spain), 25-29 Jun 2012; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; AMORPHOUS STATE; BORON; CARBON; CHANNELING; DIFFUSION; DOPED MATERIALS; GERMANIUM; GERMANIUM IONS; ION IMPLANTATION; LAYERS; MONOMERS; PHOSPHORUS; SEMICONDUCTOR MATERIALS; SUBSTRATES; TRANSIENTS

Citation Formats

Nakashima, Yoshiki, Hamamoto, Nariaki, Nagayama, Tsutomu, Koga, Yuji, Umisedo, Sei, Kawamura, Yasunori, Hashimoto, Masahiro, and Onoda, Hiroshi. Phosphorous transient enhanced diffusion suppression and activation enhancement with cluster carbon co-implantation. United States: N. p., 2012. Web. doi:10.1063/1.4766501.
Nakashima, Yoshiki, Hamamoto, Nariaki, Nagayama, Tsutomu, Koga, Yuji, Umisedo, Sei, Kawamura, Yasunori, Hashimoto, Masahiro, & Onoda, Hiroshi. Phosphorous transient enhanced diffusion suppression and activation enhancement with cluster carbon co-implantation. United States. doi:10.1063/1.4766501.
Nakashima, Yoshiki, Hamamoto, Nariaki, Nagayama, Tsutomu, Koga, Yuji, Umisedo, Sei, Kawamura, Yasunori, Hashimoto, Masahiro, and Onoda, Hiroshi. Tue . "Phosphorous transient enhanced diffusion suppression and activation enhancement with cluster carbon co-implantation". United States. doi:10.1063/1.4766501.
@article{osti_22075699,
title = {Phosphorous transient enhanced diffusion suppression and activation enhancement with cluster carbon co-implantation},
author = {Nakashima, Yoshiki and Hamamoto, Nariaki and Nagayama, Tsutomu and Koga, Yuji and Umisedo, Sei and Kawamura, Yasunori and Hashimoto, Masahiro and Onoda, Hiroshi},
abstractNote = {Carbon co-implantation is well known as an effective method for suppressing boron/phosphorous transient enhanced diffusion (TED). Germanium pre-amorphization implantation (PAI) is usually applied prior to carbon co-implantation for suppressing channeling tail of dopants. In this study, cluster carbon was applied instead of the combination of germanium PAI and monomer carbon co-implantation prior to phosphorous implantation. Dependence of phosphorous activation and TED on amorphous layer thickness, carbon dose, carbon distribution and substrate temperature have been investigated. Cluster carbon implantation enables thick amorphous layer formation and TED suppression at the same time and low temperature implantation enhances the ability of amorphous layer formation so that shallow junction and low Rs can be achieved without Ge implantation.},
doi = {10.1063/1.4766501},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1496,
place = {United States},
year = {2012},
month = {11}
}