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Title: Note: A scanning electron microscope sample holder for bidirectional characterization of atomic force microscope probe tips

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.3698073· OSTI ID:22072270
;  [1]
  1. Department of Chemistry and Institute for Optical Sciences, University of Toronto, 80 St. George Street, Toronto M5S 3H6 (Canada)

A novel sample holder that enables atomic force microscopy (AFM) tips to be mounted inside a scanning electron microscopy (SEM) for the purpose of characterizing the AFM tips is described. The holder provides quick and easy handling of tips by using a spring clip to hold them in place. The holder can accommodate two tips simultaneously in two perpendicular orientations, allowing both top and side view imaging of the tips by the SEM.

OSTI ID:
22072270
Journal Information:
Review of Scientific Instruments, Vol. 83, Issue 3; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English