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Title: One-dimensional hybrid simulation of the dc/RF combined driven capacitively coupled CF{sub 4} plasmas

Abstract

We developed a one-dimensional hybrid model to simulate the dc/RF combined driven capacitively coupled plasma for CF{sub 4} discharges. The numerical results show the influence of the dc source on the plasma density distribution, ion energy distributions (IEDs), and ion angle distributions (IADs) on both RF and dc electrodes. The increase of dc voltage impels more ions with high energy to the electrode applied to the dc source, which makes the IEDs at the dc electrode shift toward higher energy and the peaks in IADs shift toward the small angle region. At the same time, it also decreases ion-energy at the RF electrode and enlarges the ion-angles which strike the RF electrode.

Authors:
 [1]; ;  [2]
  1. School of Science, Northeastern University, Shenyang 110891 (China)
  2. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)
Publication Date:
OSTI Identifier:
22068929
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 19; Journal Issue: 11; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CARBON TETRAFLUORIDE; ELECTRIC POTENTIAL; ELECTRODES; ENERGY SPECTRA; IONS; NUMERICAL ANALYSIS; ONE-DIMENSIONAL CALCULATIONS; PLASMA; PLASMA DENSITY; PLASMA SIMULATION; RF SYSTEMS

Citation Formats

Wang Shuai, Xu Xiang, and Wang Younian. One-dimensional hybrid simulation of the dc/RF combined driven capacitively coupled CF{sub 4} plasmas. United States: N. p., 2012. Web. doi:10.1063/1.4768427.
Wang Shuai, Xu Xiang, & Wang Younian. One-dimensional hybrid simulation of the dc/RF combined driven capacitively coupled CF{sub 4} plasmas. United States. doi:10.1063/1.4768427.
Wang Shuai, Xu Xiang, and Wang Younian. Thu . "One-dimensional hybrid simulation of the dc/RF combined driven capacitively coupled CF{sub 4} plasmas". United States. doi:10.1063/1.4768427.
@article{osti_22068929,
title = {One-dimensional hybrid simulation of the dc/RF combined driven capacitively coupled CF{sub 4} plasmas},
author = {Wang Shuai and Xu Xiang and Wang Younian},
abstractNote = {We developed a one-dimensional hybrid model to simulate the dc/RF combined driven capacitively coupled plasma for CF{sub 4} discharges. The numerical results show the influence of the dc source on the plasma density distribution, ion energy distributions (IEDs), and ion angle distributions (IADs) on both RF and dc electrodes. The increase of dc voltage impels more ions with high energy to the electrode applied to the dc source, which makes the IEDs at the dc electrode shift toward higher energy and the peaks in IADs shift toward the small angle region. At the same time, it also decreases ion-energy at the RF electrode and enlarges the ion-angles which strike the RF electrode.},
doi = {10.1063/1.4768427},
journal = {Physics of Plasmas},
issn = {1070-664X},
number = 11,
volume = 19,
place = {United States},
year = {2012},
month = {11}
}