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Title: Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O{sub 2}/Ar-O{sub 2} plasmas

Abstract

Physical properties of low-pressure inductively coupled argon, oxygen, and Ar-O{sub 2} mixture plasmas are investigated using optical emission spectroscopy (OES) combined with an rf-compensated Langmuir probe measurement. In each gas discharge, the electron density and the electron temperature were obtained by using the probe. The electron temperature was also obtained by OES models and compared with that measured by the probe. The electron temperature was observed to decrease with increasing power and pressure and also observed to decrease with increasing Ar content. Argon metastable densities were calculated based on an optical transition model. In Ar-O{sub 2} discharges, the dissociation fraction of O{sub 2} molecules was estimated using optical emission actinometry. The dissociation fraction was observed to increase with increasing power and Ar content.

Authors:
; ;  [1]
  1. Department of Physics, Dong-A University, Busan 604-714 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22068925
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 19; Journal Issue: 11; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; ELECTRIC DISCHARGES; ELECTRON DENSITY; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; LANGMUIR PROBE; MOLECULES; OXYGEN; PLASMA; PLASMA PRESSURE

Citation Formats

Chung, T. H., Kang, Hae Ra, and Bae, Min Keun. Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O{sub 2}/Ar-O{sub 2} plasmas. United States: N. p., 2012. Web. doi:10.1063/1.4765357.
Chung, T. H., Kang, Hae Ra, & Bae, Min Keun. Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O{sub 2}/Ar-O{sub 2} plasmas. United States. doi:10.1063/1.4765357.
Chung, T. H., Kang, Hae Ra, and Bae, Min Keun. Thu . "Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O{sub 2}/Ar-O{sub 2} plasmas". United States. doi:10.1063/1.4765357.
@article{osti_22068925,
title = {Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O{sub 2}/Ar-O{sub 2} plasmas},
author = {Chung, T. H. and Kang, Hae Ra and Bae, Min Keun},
abstractNote = {Physical properties of low-pressure inductively coupled argon, oxygen, and Ar-O{sub 2} mixture plasmas are investigated using optical emission spectroscopy (OES) combined with an rf-compensated Langmuir probe measurement. In each gas discharge, the electron density and the electron temperature were obtained by using the probe. The electron temperature was also obtained by OES models and compared with that measured by the probe. The electron temperature was observed to decrease with increasing power and pressure and also observed to decrease with increasing Ar content. Argon metastable densities were calculated based on an optical transition model. In Ar-O{sub 2} discharges, the dissociation fraction of O{sub 2} molecules was estimated using optical emission actinometry. The dissociation fraction was observed to increase with increasing power and Ar content.},
doi = {10.1063/1.4765357},
journal = {Physics of Plasmas},
issn = {1070-664X},
number = 11,
volume = 19,
place = {United States},
year = {2012},
month = {11}
}