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Title: Dielectric properties in microwave remote plasma sustained in argon: Expanding plasma conditions

Abstract

This work is devoted to the study of the relative permittivity in argon expanding plasma produced below a microwave discharge sustained in a quartz tube and working at 2.45 GHz. We discuss results and explain the microwave propagation within the reactor, outside the quartz tube. It is shown that at low pressures (133 Pa) and at powers ranging from 100 W to 400 W, the wave frequency remains lower than the plasma frequency anywhere in the expanding plasma. Under these conditions, the real part of the relative permittivity is negative and the wave is reflected. Surprisingly, in these conditions, the plasma is produced inside and outside the quartz tube, below the wave launcher. This effect can be explained considering a surface wave propagating at the surface of the quartz tube then into the reactor, on the external surface of the expanding plasma below the quartz tube.

Authors:
;  [1]
  1. UMR 7315 CNRS, SPCTS, 12 rue Atlantis, 87068 Limoges (France)
Publication Date:
OSTI Identifier:
22068865
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 19; Journal Issue: 11; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; GHZ RANGE; HIGH-FREQUENCY DISCHARGES; LANGMUIR FREQUENCY; MICROWAVE RADIATION; PERMITTIVITY; PLASMA; PLASMA PRODUCTION; QUARTZ; SURFACES; TUBES; WAVE PROPAGATION

Citation Formats

Jauberteau, J. L., and Jauberteau, I. Dielectric properties in microwave remote plasma sustained in argon: Expanding plasma conditions. United States: N. p., 2012. Web. doi:10.1063/1.4766897.
Jauberteau, J. L., & Jauberteau, I. Dielectric properties in microwave remote plasma sustained in argon: Expanding plasma conditions. United States. doi:10.1063/1.4766897.
Jauberteau, J. L., and Jauberteau, I. Thu . "Dielectric properties in microwave remote plasma sustained in argon: Expanding plasma conditions". United States. doi:10.1063/1.4766897.
@article{osti_22068865,
title = {Dielectric properties in microwave remote plasma sustained in argon: Expanding plasma conditions},
author = {Jauberteau, J. L. and Jauberteau, I.},
abstractNote = {This work is devoted to the study of the relative permittivity in argon expanding plasma produced below a microwave discharge sustained in a quartz tube and working at 2.45 GHz. We discuss results and explain the microwave propagation within the reactor, outside the quartz tube. It is shown that at low pressures (133 Pa) and at powers ranging from 100 W to 400 W, the wave frequency remains lower than the plasma frequency anywhere in the expanding plasma. Under these conditions, the real part of the relative permittivity is negative and the wave is reflected. Surprisingly, in these conditions, the plasma is produced inside and outside the quartz tube, below the wave launcher. This effect can be explained considering a surface wave propagating at the surface of the quartz tube then into the reactor, on the external surface of the expanding plasma below the quartz tube.},
doi = {10.1063/1.4766897},
journal = {Physics of Plasmas},
issn = {1070-664X},
number = 11,
volume = 19,
place = {United States},
year = {2012},
month = {11}
}