Dependence of ion beam current on position of mobile plate tuner in multi-frequencies microwaves electron cyclotron resonance ion source

Journal Article · Wed Feb 15 00:00:00 EST 2012 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3662016· OSTI ID:22063815

Kurisu, Yosuke; Kiriyama, Ryutaro; Takenaka, Tomoya; Nozaki, Dai; Sato, Fuminobu; Kato, Yushi; Iida, Toshiyuki ^[1]

---

1. Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871 (Japan)

We are constructing a tandem-type electron cyclotron resonance ion source (ECRIS). The first stage of this can supply 2.45 GHz and 11-13 GHz microwaves to plasma chamber individually and simultaneously. We optimize the beam current I{sub FC} by the mobile plate tuner. The I{sub FC} is affected by the position of the mobile plate tuner in the chamber as like a circular cavity resonator. We aim to clarify the relation between the I{sub FC} and the ion saturation current in the ECRIS against the position of the mobile plate tuner. We obtained the result that the variation of the plasma density contributes largely to the variation of the I{sub FC} when we change the position of the mobile plate tuner.

• OSTI ID: 22063815
• Journal Information: Review of Scientific Instruments, Vol. 83, Issue 2; Conference: ICIS 2011: 14. international conference on ion sources, Giardini-Naxos, Sicily (Italy), 12-16 Sep 2011; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BEAM CURRENTS
CAVITY RESONATORS
CYCLOTRON RESONANCE
ECR ION SOURCES
GHZ RANGE
ION BEAMS
MICROWAVE RADIATION
PLASMA
PLASMA DENSITY