skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: X-ray beam induced current method at the laboratory x-ray source

Abstract

The x-ray beam induced current method (XBIC) is realized on the laboratory x-ray source using the polycapillary x-ray optics. It is shown that rather good images of grain boundaries in Si can be obtained by this method. The parameters of x-ray beam are estimated by the simulation of Schottky diode image. A good correlation between the experimental and calculated grain boundary XBIC contrast is obtained. The possibilities of laboratory source based XBIC method are estimated.

Authors:
; ; ; ; ;  [1]
  1. Institution of Russian Academy of Sciences, Institute of Microelectronics Technology, and High-Purity Materials RAS, Chernogolovka 142432 (Russian Federation)
Publication Date:
OSTI Identifier:
22063717
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 82; Journal Issue: 9; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BEAM CURRENTS; GRAIN BOUNDARIES; OPTICS; PHOTON BEAMS; SCHOTTKY BARRIER DIODES; SIMULATION; X-RAY SOURCES

Citation Formats

Fahrtdinov, R. R., Feklisova, O. V., Grigoriev, M. V., Irzhak, D. V., Roshchupkin, D. V., and Yakimov, E. B. X-ray beam induced current method at the laboratory x-ray source. United States: N. p., 2011. Web. doi:10.1063/1.3633948.
Fahrtdinov, R. R., Feklisova, O. V., Grigoriev, M. V., Irzhak, D. V., Roshchupkin, D. V., & Yakimov, E. B. X-ray beam induced current method at the laboratory x-ray source. United States. doi:10.1063/1.3633948.
Fahrtdinov, R. R., Feklisova, O. V., Grigoriev, M. V., Irzhak, D. V., Roshchupkin, D. V., and Yakimov, E. B. Thu . "X-ray beam induced current method at the laboratory x-ray source". United States. doi:10.1063/1.3633948.
@article{osti_22063717,
title = {X-ray beam induced current method at the laboratory x-ray source},
author = {Fahrtdinov, R. R. and Feklisova, O. V. and Grigoriev, M. V. and Irzhak, D. V. and Roshchupkin, D. V. and Yakimov, E. B.},
abstractNote = {The x-ray beam induced current method (XBIC) is realized on the laboratory x-ray source using the polycapillary x-ray optics. It is shown that rather good images of grain boundaries in Si can be obtained by this method. The parameters of x-ray beam are estimated by the simulation of Schottky diode image. A good correlation between the experimental and calculated grain boundary XBIC contrast is obtained. The possibilities of laboratory source based XBIC method are estimated.},
doi = {10.1063/1.3633948},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 9,
volume = 82,
place = {United States},
year = {2011},
month = {9}
}