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A machine-learning-based approach for angular alignment of 2D multilayer Laue lenses for high-resolution hard x-ray microscopy

Conference ·
DOI:https://doi.org/10.1117/12.2673688· OSTI ID:2205639
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Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
SC0012704
OSTI ID:
2205639
Report Number(s):
BNL-224967-2023-COPA
Resource Relation:
Conference: SPIE Optical Engineering + Applications, San Diego, United States, 8/20/2023 - 8/25/2023
Country of Publication:
United States
Language:
English

References (22)

Hard x-ray nanofocusing by multilayer Laue lenses journal June 2014
Optical Properties of MoSi 2 /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device journal October 2008
Fabrication and efficiency measurement of a Mo/C/Si/C three material system multilayer Laue lens journal March 2017
Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam journal July 2010
Multilayer Laue Lens: A Brief History and Current Status journal July 2016
Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching journal January 2020
Efficient concentration of high-energy x-rays for diffraction-limited imaging resolution journal January 2017
ID16B: a hard X-ray nanoprobe beamline at the ESRF for nano-analysis journal January 2016
X-ray focusing with efficient high-NA multilayer Laue lenses journal November 2017
Nanospectroscopy Captures Nanoscale Compositional Zonation in Barite Solid Solutions journal August 2018
Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses journal January 2011
Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses journal January 2017
Development and characterization of monolithic multilayer Laue lens nanofocusing optics journal June 2016
Achieving diffraction-limited nanometer-scale X-ray point focus with two crossed multilayer Laue lenses: alignment challenges journal January 2017
Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope journal March 2013
Design and performance of a scanning ptychography microscope journal March 2014
Pushing the limits: an instrument for hard X-ray imaging below 20 nm journal January 2015
Design and performance of an X-ray scanning microscope at the Hard X-ray Nanoprobe beamline of NSLS-II journal October 2017
Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science journal March 2018
2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy journal January 2020
Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy journal October 2020
Machine-learning-based automatic small-angle measurement between planar surfaces in interferometer images: A 2D multilayer Laue lenses case journal February 2023

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