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Title: Fabry-Perot interferometer utilized for displacement measurement in a large measuring range

Abstract

The optical configuration of a Fabry-Perot interferometer is uncomplicated. This has already been applied in different measurement systems. For the displacement measurement with the Fabry-Perot interferometer, the result is significantly influenced by the tilt angles of the measurement mirror in the interferometer. Hence, only for the rather small measuring range, the Fabry-Perot interferometer is available. The goal of this investigation is to enhance the measuring range of Fabry-Perot interferometer by compensating the tilt angles. To verify the measuring characteristic of the self-developed Fabry-Perot interferometer, some comparison measurements with a reference standard have been performed. The maximum deviation of comparison experiments is less than 0.3 {mu}m in the traveling range of 30 mm. The experimental results show that the Fabry-Perot interferometer is highly stable, insensitive to environment effects, and can meet the measuring requirement of the submicrometer order.

Authors:
 [1];  [2];  [3]
  1. Institute of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin 640, Taiwan (China)
  2. Institute of Mechanical and Electro-Mechanical Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan (China)
  3. Department of Mechanical Engineering, National Central University, Jhongli. Taoyuan 320, Taiwan (China)
Publication Date:
OSTI Identifier:
22055722
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 81; Journal Issue: 9; Other Information: (c) 2010 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COMPARATIVE EVALUATIONS; CONFIGURATION; EXPERIMENTAL DATA; FABRY-PEROT INTERFEROMETER; MIRRORS

Citation Formats

Wang, Yung-Cheng, Shyu, Lih-Horng, and Chang, Chung-Ping. Fabry-Perot interferometer utilized for displacement measurement in a large measuring range. United States: N. p., 2010. Web. doi:10.1063/1.3480551.
Wang, Yung-Cheng, Shyu, Lih-Horng, & Chang, Chung-Ping. Fabry-Perot interferometer utilized for displacement measurement in a large measuring range. United States. doi:10.1063/1.3480551.
Wang, Yung-Cheng, Shyu, Lih-Horng, and Chang, Chung-Ping. Wed . "Fabry-Perot interferometer utilized for displacement measurement in a large measuring range". United States. doi:10.1063/1.3480551.
@article{osti_22055722,
title = {Fabry-Perot interferometer utilized for displacement measurement in a large measuring range},
author = {Wang, Yung-Cheng and Shyu, Lih-Horng and Chang, Chung-Ping},
abstractNote = {The optical configuration of a Fabry-Perot interferometer is uncomplicated. This has already been applied in different measurement systems. For the displacement measurement with the Fabry-Perot interferometer, the result is significantly influenced by the tilt angles of the measurement mirror in the interferometer. Hence, only for the rather small measuring range, the Fabry-Perot interferometer is available. The goal of this investigation is to enhance the measuring range of Fabry-Perot interferometer by compensating the tilt angles. To verify the measuring characteristic of the self-developed Fabry-Perot interferometer, some comparison measurements with a reference standard have been performed. The maximum deviation of comparison experiments is less than 0.3 {mu}m in the traveling range of 30 mm. The experimental results show that the Fabry-Perot interferometer is highly stable, insensitive to environment effects, and can meet the measuring requirement of the submicrometer order.},
doi = {10.1063/1.3480551},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 9,
volume = 81,
place = {United States},
year = {2010},
month = {9}
}