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Title: Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering

Abstract

Aluminum doped zinc oxide (AZO) thin films were obtained by RF magnetron sputtering. The effects of deposition parameters such as power, gas flow conditions, and substrate heating have been studied. Deposited and annealed films were characterized for composition as well as microstructure using x ray photoelectron spectroscopy and x ray diffraction. Films produced were polycrystalline in nature. Surface imaging and roughness studies were carried out using SEM and AFM, respectively. Columnar grain growth was predominantly observed. Optical and electrical properties were evaluated for transparent conducting oxide applications. Processing conditions were optimized to obtain highly transparent AZO films with a low resistivity value of 6.67 x 10{sup -4}{Omega} cm.

Authors:
; ; ; ;  [1];  [2]
  1. Department of Electrical Engineering and Computer Science, University of Central Florida, Orlando, Florida 32816 (United States)
  2. (United States)
Publication Date:
OSTI Identifier:
22054120
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 29; Journal Issue: 5; Other Information: (c) 2011 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; ANNEALING; ATOMIC FORCE MICROSCOPY; DEPOSITION; DOPED MATERIALS; GAS FLOW; GRAIN GROWTH; HEATING; MAGNETRONS; MICROSTRUCTURE; POLYCRYSTALS; ROUGHNESS; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDES

Citation Formats

Shantheyanda, B. P., Todi, V. O., Sundaram, K. B., Vijayakumar, A., Oladeji, I., and Planar Energy Inc., 653 W. Michigan St., Orlando, Florida 32805. Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering. United States: N. p., 2011. Web. doi:10.1116/1.3624787.
Shantheyanda, B. P., Todi, V. O., Sundaram, K. B., Vijayakumar, A., Oladeji, I., & Planar Energy Inc., 653 W. Michigan St., Orlando, Florida 32805. Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering. United States. doi:10.1116/1.3624787.
Shantheyanda, B. P., Todi, V. O., Sundaram, K. B., Vijayakumar, A., Oladeji, I., and Planar Energy Inc., 653 W. Michigan St., Orlando, Florida 32805. Thu . "Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering". United States. doi:10.1116/1.3624787.
@article{osti_22054120,
title = {Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering},
author = {Shantheyanda, B. P. and Todi, V. O. and Sundaram, K. B. and Vijayakumar, A. and Oladeji, I. and Planar Energy Inc., 653 W. Michigan St., Orlando, Florida 32805},
abstractNote = {Aluminum doped zinc oxide (AZO) thin films were obtained by RF magnetron sputtering. The effects of deposition parameters such as power, gas flow conditions, and substrate heating have been studied. Deposited and annealed films were characterized for composition as well as microstructure using x ray photoelectron spectroscopy and x ray diffraction. Films produced were polycrystalline in nature. Surface imaging and roughness studies were carried out using SEM and AFM, respectively. Columnar grain growth was predominantly observed. Optical and electrical properties were evaluated for transparent conducting oxide applications. Processing conditions were optimized to obtain highly transparent AZO films with a low resistivity value of 6.67 x 10{sup -4}{Omega} cm.},
doi = {10.1116/1.3624787},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 29,
place = {United States},
year = {2011},
month = {9}
}