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Title: Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering

Abstract

Transparent conductive ZnO:Al thin films were successfully deposited on glass substrates via radio frequency sputtering with a ceramic target in ambient argon. X-ray diffraction, profilometry, Hall-effect measurement, and spectrophotometry were employed to investigate the structural, electrical, and optical properties of films. The electrical and optical properties were found to be strongly dependent on the crystalline quality, grain size, and thickness of the films. X-ray diffraction spectra indicated that the crystalline quality of the films improved and grains became larger with increasing substrate temperature. Transmission spectra revealed that films possessed a higher transmittance in the visible range with an increase of the substrate temperature, but the band gap did not broaden obviously. Films with a resistivity of about 2.66 x 10{sup -4}{Omega} cm and an average transmittance above 90% in the visible range were obtained at the optimum temperature of 450 deg. C.

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
22054116
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 29; Journal Issue: 5; Other Information: (c) 2011 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; ARGON; CERAMICS; ENERGY GAP; GLASS; GRAIN SIZE; HALL EFFECT; LIGHT TRANSMISSION; OPTICAL PROPERTIES; RADIOWAVE RADIATION; SPECTROPHOTOMETRY; SPUTTERING; TEMPERATURE DEPENDENCE; THIN FILMS; X-RAY DIFFRACTION; ZINC OXIDES

Citation Formats

Deng Xueran, Deng Hong, Wei Min, Chen Jinju, and Chen Han. Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering. United States: N. p., 2011. Web. doi:10.1116/1.3610175.
Deng Xueran, Deng Hong, Wei Min, Chen Jinju, & Chen Han. Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering. United States. doi:10.1116/1.3610175.
Deng Xueran, Deng Hong, Wei Min, Chen Jinju, and Chen Han. Thu . "Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering". United States. doi:10.1116/1.3610175.
@article{osti_22054116,
title = {Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering},
author = {Deng Xueran and Deng Hong and Wei Min and Chen Jinju and Chen Han},
abstractNote = {Transparent conductive ZnO:Al thin films were successfully deposited on glass substrates via radio frequency sputtering with a ceramic target in ambient argon. X-ray diffraction, profilometry, Hall-effect measurement, and spectrophotometry were employed to investigate the structural, electrical, and optical properties of films. The electrical and optical properties were found to be strongly dependent on the crystalline quality, grain size, and thickness of the films. X-ray diffraction spectra indicated that the crystalline quality of the films improved and grains became larger with increasing substrate temperature. Transmission spectra revealed that films possessed a higher transmittance in the visible range with an increase of the substrate temperature, but the band gap did not broaden obviously. Films with a resistivity of about 2.66 x 10{sup -4}{Omega} cm and an average transmittance above 90% in the visible range were obtained at the optimum temperature of 450 deg. C.},
doi = {10.1116/1.3610175},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 29,
place = {United States},
year = {2011},
month = {9}
}