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Title: Size control of nanopores formed on SiO{sub 2} glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection

Abstract

Swift-heavy-ion irradiation creates latent tracks in SiO{sub 2} glass and nanopores with a high aspect ratio can be formed along these ion paths by selective etching of the latent tracks using hydrogen fluoride (HF) vapor. Here we report that the size of nanopores can easily be controlled by simply changing the temperature of the HF solution generating the vapor and/or that of the SiO{sub 2} glass exposed to the vapor. Furthermore, this method of size control was used to produce SiO{sub 2} glass sheets with nanopores of different sizes and number densities for use as the waveguide layer in the sensing plates for a waveguide-mode sensor. In comparison with nonperforated plates, the increased surface area due to the formation of nanopores was found to create up to a tenfold increase in sensitivity.

Authors:
; ; ;  [1];  [2]
  1. Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8562 (Japan)
  2. (Japan)
Publication Date:
OSTI Identifier:
22054112
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 29; Journal Issue: 5; Other Information: (c) 2011 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ASPECT RATIO; DENSITY; ETCHING; GLASS; HEAVY IONS; HYDROGEN FLUORIDES; ION BEAMS; NANOSTRUCTURES; PARTICLE TRACKS; PLATES; SENSITIVITY; SILICON OXIDES; SURFACE AREA; VAPORS; WAVEGUIDES

Citation Formats

Nomura, Ken-ichi, Fujimaki, Makoto, Awazu, Koichi, Komatsubara, Tetsuro, and Tandem Accelerator Complex, Research Facility Center for Science and Technology, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8577. Size control of nanopores formed on SiO{sub 2} glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection. United States: N. p., 2011. Web. doi:10.1116/1.3609795.
Nomura, Ken-ichi, Fujimaki, Makoto, Awazu, Koichi, Komatsubara, Tetsuro, & Tandem Accelerator Complex, Research Facility Center for Science and Technology, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8577. Size control of nanopores formed on SiO{sub 2} glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection. United States. doi:10.1116/1.3609795.
Nomura, Ken-ichi, Fujimaki, Makoto, Awazu, Koichi, Komatsubara, Tetsuro, and Tandem Accelerator Complex, Research Facility Center for Science and Technology, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8577. Thu . "Size control of nanopores formed on SiO{sub 2} glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection". United States. doi:10.1116/1.3609795.
@article{osti_22054112,
title = {Size control of nanopores formed on SiO{sub 2} glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection},
author = {Nomura, Ken-ichi and Fujimaki, Makoto and Awazu, Koichi and Komatsubara, Tetsuro and Tandem Accelerator Complex, Research Facility Center for Science and Technology, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8577},
abstractNote = {Swift-heavy-ion irradiation creates latent tracks in SiO{sub 2} glass and nanopores with a high aspect ratio can be formed along these ion paths by selective etching of the latent tracks using hydrogen fluoride (HF) vapor. Here we report that the size of nanopores can easily be controlled by simply changing the temperature of the HF solution generating the vapor and/or that of the SiO{sub 2} glass exposed to the vapor. Furthermore, this method of size control was used to produce SiO{sub 2} glass sheets with nanopores of different sizes and number densities for use as the waveguide layer in the sensing plates for a waveguide-mode sensor. In comparison with nonperforated plates, the increased surface area due to the formation of nanopores was found to create up to a tenfold increase in sensitivity.},
doi = {10.1116/1.3609795},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 29,
place = {United States},
year = {2011},
month = {9}
}