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Title: Microstructure and tribological performance of nanocomposite Ti-Si-C-N coatings deposited using hexamethyldisilazane precursor

Abstract

Thick nanocomposite Ti-Si-C-N coatings (20-30 {mu}m) were deposited on Ti-6Al-4V substrate by magnetron sputtering of Ti in a gas mixture of Ar, N{sub 2}, and hexamethyldisilazane (HMDSN) under various deposition conditions. Microstructure and composition of the coatings were studied using scanning electron microscopy, x-ray diffraction, and energy dispersive x-ray spectroscopy, while the mechanical and tribological properties of these coatings were studied using Rc indentation, and micro- and nanoindentations, solid particle erosion testing, and ball-on-disk wear testing. It has been observed that the Si concentration of these coatings is varied from 0% (TiN) to 15% (Ti-Si-C-N), while the structure of these coatings is similar to the nanocomposite Ti-Si-N coatings and consists of nanocrystalline B1 structured Ti(C,N) in an amorphous matrix of SiC{sub x}N{sub y} with the grain size of 5->100 nm, depending on the coating preparation process. These coatings exhibit excellent adhesion when subjected to Rc indentation tests. The microhardness of these coatings varies from 1200 to 3400 HV25, while the nanohardness varies from 10 to 26 GPa. Both the microhardness and nanohardness are slightly lower than those of similar coatings prepared using trimethylsilane. However, the erosion test using a microsand erosion tester at both 30 deg. and 90 deg. incidentmore » angles shows that these coatings have very high erosion resistance and up to a few hundred times of improvement has been observed. These coatings also exhibit very high resistance to sliding wear with a low coefficient of friction of about 0.2 in dry sliding. There are a few advantages of using the HMDSN precursor to prepare the Ti-Si-C-N coatings over conventional magnetron sputtered deposition of Ti-Si-N coatings including composition uniformity, precursor handling safety, and high deposition rate. The coatings can be applied to protect gas turbine compressor blades from solid particle erosion and steam turbine blades from liquid droplet erosion, as well as other mechanical components that experience severe abrasion. These coatings may also be used in areas where both high wear resistance and low friction are required.« less

Authors:
; ; ;  [1]
  1. Southwest Research Institute registered , P.O. Box 28510, San Antonio, Texas 78228-0510 (United States)
Publication Date:
OSTI Identifier:
22053991
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 28; Journal Issue: 5; Other Information: (c) 2010 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CARBON COMPOUNDS; COATINGS; COMPRESSOR BLADES; CRYSTALS; EROSION; GAS TURBINES; GRAIN SIZE; INCIDENCE ANGLE; MAGNETRONS; MICROHARDNESS; NANOSTRUCTURES; SILICON COMPOUNDS; SPUTTERING; STEAM TURBINES; TITANIUM ALLOYS; TITANIUM NITRIDES; WEAR RESISTANCE; X-RAY DIFFRACTION; X-RAY SPECTROSCOPY

Citation Formats

Ronghua, Wei, Rincon, Christopher, Langa, Edward, Qi, Yang, and National Research Council Canada, 1200 Montreal Road, Building M-13, Ottawa, Ontario K1A0R6. Microstructure and tribological performance of nanocomposite Ti-Si-C-N coatings deposited using hexamethyldisilazane precursor. United States: N. p., 2010. Web. doi:10.1116/1.3463709.
Ronghua, Wei, Rincon, Christopher, Langa, Edward, Qi, Yang, & National Research Council Canada, 1200 Montreal Road, Building M-13, Ottawa, Ontario K1A0R6. Microstructure and tribological performance of nanocomposite Ti-Si-C-N coatings deposited using hexamethyldisilazane precursor. United States. doi:10.1116/1.3463709.
Ronghua, Wei, Rincon, Christopher, Langa, Edward, Qi, Yang, and National Research Council Canada, 1200 Montreal Road, Building M-13, Ottawa, Ontario K1A0R6. Wed . "Microstructure and tribological performance of nanocomposite Ti-Si-C-N coatings deposited using hexamethyldisilazane precursor". United States. doi:10.1116/1.3463709.
@article{osti_22053991,
title = {Microstructure and tribological performance of nanocomposite Ti-Si-C-N coatings deposited using hexamethyldisilazane precursor},
author = {Ronghua, Wei and Rincon, Christopher and Langa, Edward and Qi, Yang and National Research Council Canada, 1200 Montreal Road, Building M-13, Ottawa, Ontario K1A0R6},
abstractNote = {Thick nanocomposite Ti-Si-C-N coatings (20-30 {mu}m) were deposited on Ti-6Al-4V substrate by magnetron sputtering of Ti in a gas mixture of Ar, N{sub 2}, and hexamethyldisilazane (HMDSN) under various deposition conditions. Microstructure and composition of the coatings were studied using scanning electron microscopy, x-ray diffraction, and energy dispersive x-ray spectroscopy, while the mechanical and tribological properties of these coatings were studied using Rc indentation, and micro- and nanoindentations, solid particle erosion testing, and ball-on-disk wear testing. It has been observed that the Si concentration of these coatings is varied from 0% (TiN) to 15% (Ti-Si-C-N), while the structure of these coatings is similar to the nanocomposite Ti-Si-N coatings and consists of nanocrystalline B1 structured Ti(C,N) in an amorphous matrix of SiC{sub x}N{sub y} with the grain size of 5->100 nm, depending on the coating preparation process. These coatings exhibit excellent adhesion when subjected to Rc indentation tests. The microhardness of these coatings varies from 1200 to 3400 HV25, while the nanohardness varies from 10 to 26 GPa. Both the microhardness and nanohardness are slightly lower than those of similar coatings prepared using trimethylsilane. However, the erosion test using a microsand erosion tester at both 30 deg. and 90 deg. incident angles shows that these coatings have very high erosion resistance and up to a few hundred times of improvement has been observed. These coatings also exhibit very high resistance to sliding wear with a low coefficient of friction of about 0.2 in dry sliding. There are a few advantages of using the HMDSN precursor to prepare the Ti-Si-C-N coatings over conventional magnetron sputtered deposition of Ti-Si-N coatings including composition uniformity, precursor handling safety, and high deposition rate. The coatings can be applied to protect gas turbine compressor blades from solid particle erosion and steam turbine blades from liquid droplet erosion, as well as other mechanical components that experience severe abrasion. These coatings may also be used in areas where both high wear resistance and low friction are required.},
doi = {10.1116/1.3463709},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 28,
place = {United States},
year = {2010},
month = {9}
}